Comment tylannitride SNF 2009-06-06 17:15:58: TEMPL reading 400.0C at all times

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sat Jun 6 17:15:59 PDT 2009


this is true for pump11 program also.
no trouble with my film thickness and good uniformity throughout the center boat (only one i ran).  most likely a thermocouple problem not an actual heater problem...but beware because the cooldown step only take TEMPL into account and thus ends immediately.  wafers come out much closer to 725C than 600C desired by the program.




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