Problem tylannitride SNF 2009-06-14 00:23:29: MFS alarm; spots on wafer; rust colored residue on boat

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Sun Jun 14 00:23:30 PDT 2009


Ran nitride 2 for 16min. GAve MFS alarm during steps 30 and 35 but process ran ok. Thickness also seems to be reasonable but there are spots visible to the  naked eye on few of my wafers.




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