Comment tylannitride SNF 2009-06-15 21:40:41: particles
yeh at snf.stanford.edu
yeh at snf.stanford.edu
Mon Jun 15 21:40:42 PDT 2009
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Problem tylannitride SNF 2009-06-14 00:23:29: MFS alarm; spots on wafer; rust colored residue on boat
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Problem tylannitride SNF 2009-06-18 14:53:57: Did not Boat In Completely
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lots of particles on boat 2 and on rods under boat 2.
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Problem tylannitride SNF 2009-06-14 00:23:29: MFS alarm; spots on wafer; rust colored residue on boat
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Problem tylannitride SNF 2009-06-18 14:53:57: Did not Boat In Completely
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