From tberg at snf.stanford.edu Mon Mar 2 06:32:49 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Mar 2009 06:32:49 -0800 Subject: Comment tylannitride SNF 2009-02-17 09:05:51: changed pump oil Message-ID: logged From tberg at snf.stanford.edu Mon Mar 2 06:33:41 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Mar 2009 06:33:41 -0800 Subject: Problem tylannitride SNF 2009-02-20 17:35:41: Power Fail error Message-ID: Pump changed, leak checked, coated needs test From tberg at snf.stanford.edu Mon Mar 2 06:34:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Mar 2009 06:34:05 -0800 Subject: Comment tylannitride SNF 2009-02-25 06:29:10: pump changed Message-ID: Pump replaced leak checked From tberg at snf.stanford.edu Mon Mar 2 06:34:38 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Mar 2009 06:34:38 -0800 Subject: Problem tylannitride SNF 2009-03-02 06:34:38: Needs test Message-ID: From maurice at snf.stanford.edu Mon Mar 2 18:11:39 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 2 Mar 2009 18:11:39 -0800 Subject: Problem tylannitride SNF 2009-03-02 06:34:38: Needs test Message-ID: Test complete. Expected 1400Ang Actual 1111Ang a little thin IR=2.22 From king at snf.stanford.edu Wed Mar 4 15:00:46 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 4 Mar 2009 15:00:46 -0800 Subject: Comment tylannitride SNF 2009-03-04 15:00:45: found tube vented Message-ID: From chen0622 at snf.stanford.edu Fri Mar 6 07:05:43 2009 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 6 Mar 2009 07:05:43 -0800 Subject: Problem tylannitride SNF 2009-03-06 07:05:43: Message-ID: The screen got locked out. EricP helped me to reboot the computer so I can load the pump10 program and run the pump10 program. From chen0622 at snf.stanford.edu Fri Mar 6 07:35:50 2009 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Fri, 6 Mar 2009 07:35:50 -0800 Subject: Problem tylannitride SNF 2009-03-06 07:35:50: Message-ID: The previious problem is for the run of yesterday. Also the display on tube panel shows some wiered characters. From tberg at snf.stanford.edu Mon Mar 9 06:16:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Mar 2009 06:16:13 -0700 Subject: Problem tylannitride SNF 2009-03-06 07:05:43: Message-ID: reset terminal and loaded recipe From tberg at snf.stanford.edu Mon Mar 9 06:16:22 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Mar 2009 06:16:22 -0700 Subject: Problem tylannitride SNF 2009-03-06 07:35:50: Message-ID: reset terminal and loaded recipe From lindaw at snf.stanford.edu Mon Mar 9 10:50:41 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 9 Mar 2009 10:50:41 -0700 Subject: Comment tylannitride SNF 2009-03-09 10:50:41: mfs alarm at 10:50 in step 70 of run Message-ID: From jwpchen at snf.stanford.edu Wed Mar 11 22:33:57 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Wed, 11 Mar 2009 22:33:57 -0700 Subject: Problem tylannitride SNF 2009-03-11 22:33:56: tycom and panel gremlins Message-ID: after stopping pump10, procid reads ********. Then after running nitride2 the procid changes every now and then, for example changing into "litride2". The "STEP ET" column looks bogus as well. From maurice at snf.stanford.edu Thu Mar 12 10:39:09 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 10:39:09 -0700 Subject: Comment tylannitride SNF 2009-03-04 15:00:45: found tube vented Message-ID: archive From maurice at snf.stanford.edu Thu Mar 12 10:40:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 10:40:29 -0700 Subject: Comment tylannitride SNF 2009-02-27 14:48:39: I aborted the run in step 105 Message-ID: archive From maurice at snf.stanford.edu Thu Mar 12 14:45:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Mar 2009 14:45:29 -0700 Subject: Shutdown tylannitride SNF 2009-03-12 14:45:28: MFS alarm Message-ID: NH3 interlock LEAKC interlock step 105 step 110 From seymour at snf.stanford.edu Thu Mar 12 14:54:03 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 Mar 2009 14:54:03 -0700 Subject: Shutdown tylannitride SNF 2009-03-12 14:45:28: MFS alarm Message-ID: found tube controller lockedup with NH# and N2 leds flashing. abborted run and front panel came up in stanby. loaded pump10 and it loaded with no errors. putting the tube to problem as user wants to remove wafers and use. From seymour at snf.stanford.edu Thu Mar 12 14:55:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 12 Mar 2009 14:55:46 -0700 Subject: Problem tylannitride SNF 2009-03-12 14:55:45: tube computer locked up at end of run Message-ID: In ster 105 the computer locked up and I needed to abort recipe. I loaded a new one and there were no errors. From jwpchen at snf.stanford.edu Thu Mar 12 23:35:51 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 12 Mar 2009 23:35:51 -0700 Subject: Problem tylannitride SNF 2009-03-12 23:35:49: MFS alarm step 70 Message-ID: while running "MEWSN" (sic), got MFS alarm, N2BKFL at 2.1, panel blinky From jwpchen at snf.stanford.edu Sun Mar 15 04:41:14 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 15 Mar 2009 04:41:14 -0700 Subject: Comment tylannitride SNF 2009-03-15 04:41:13: tycom and panel normal this time Message-ID: the char-juggling gremlins have left, tube no longer drops into standby mode after programs end From tberg at snf.stanford.edu Mon Mar 16 06:17:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:17:43 -0700 Subject: Problem tylannitride SNF 2009-03-11 22:33:56: tycom and panel gremlins Message-ID: Reseated ICs in slave CPU and reset no lockups since Friday From tberg at snf.stanford.edu Mon Mar 16 06:18:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:18:00 -0700 Subject: Problem tylannitride SNF 2009-03-12 14:55:45: tube computer locked up at end of run Message-ID: Reseated ICs in slave CPU and reset no lockups since Friday From tberg at snf.stanford.edu Mon Mar 16 06:18:43 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:18:43 -0700 Subject: Comment tylannitride SNF 2009-03-15 04:41:13: tycom and panel normal this time Message-ID: Reseated ICs in slave CPU and reset no lockups since Friday From tberg at snf.stanford.edu Mon Mar 16 06:19:23 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Mar 2009 06:19:23 -0700 Subject: Problem tylannitride SNF 2009-03-12 23:35:49: MFS alarm step 70 Message-ID: Some MFS alarms are possible if mfc does not go to zero quickly enough From chen0622 at snf.stanford.edu Mon Mar 16 12:35:39 2009 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 16 Mar 2009 12:35:39 -0700 Subject: Shutdown tylannitride SNF 2009-03-16 12:35:38: leak on the tube Message-ID: Maintenance staff asked me to shutdown the tube From seymour at snf.stanford.edu Tue Mar 17 13:06:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Mar 2009 13:06:43 -0700 Subject: Shutdown tylannitride SNF 2009-03-16 12:35:38: leak on the tube Message-ID: checked and changed all tube seals. tube now pumps to a good base and a leak rate of about 10mT/min. From seymour at snf.stanford.edu Tue Mar 17 13:07:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Mar 2009 13:07:00 -0700 Subject: Problem tylannitride SNF 2009-03-17 13:07:00: needs test after repair Message-ID: From maurice at snf.stanford.edu Tue Mar 17 14:16:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Mar 2009 14:16:42 -0700 Subject: Comment tylannitride SNF 2009-03-17 14:16:41: testing Message-ID: From maurice at snf.stanford.edu Tue Mar 17 17:24:57 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 17 Mar 2009 17:24:57 -0700 Subject: Shutdown tylannitride SNF 2009-03-17 17:24:57: Test low/retest tomorrow Message-ID: NEWLSN 00:15:00 expected ~1450 ang Actual 1078 I'll run another test tomorrow morning. From maurice at snf.stanford.edu Wed Mar 18 11:37:56 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 11:37:56 -0700 Subject: Problem tylannitride SNF 2009-03-18 11:37:55: N2BFK leak in dep step Message-ID: N2BFK leak in dep step70 of NEWLSN recipe reading 1.2 setpoint is 0 From maurice at snf.stanford.edu Wed Mar 18 14:30:00 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 14:30:00 -0700 Subject: Shutdown tylannitride SNF 2009-03-17 17:24:57: Test low/retest tomorrow Message-ID: NEWLSN 00:15:00 expected ~1450 ang Actual 1078 second test 1158A ir= 2.2 from woolam all flows and pressure look normal From maurice at snf.stanford.edu Wed Mar 18 14:30:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 14:30:14 -0700 Subject: Comment tylannitride SNF 2009-03-17 14:16:41: testing Message-ID: archive From maurice at snf.stanford.edu Wed Mar 18 14:30:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 14:30:27 -0700 Subject: Problem tylannitride SNF 2009-03-17 13:07:00: needs test after repair Message-ID: see log From maurice at snf.stanford.edu Wed Mar 18 14:31:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Mar 2009 14:31:14 -0700 Subject: Comment tylannitride SNF 2009-03-18 14:31:13: Qual test had low deprate Message-ID: NEWLSN 00:15:00 expected ~1450 ang Actual 1078 second test 1158A ir= 2.2 from woolam all flows and pressure look normal From tberg at snf.stanford.edu Fri Mar 27 06:11:44 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 06:11:44 -0700 Subject: Problem tylannitride SNF 2009-03-18 11:37:55: N2BFK leak in dep step Message-ID: normal From tberg at snf.stanford.edu Fri Mar 27 06:11:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Mar 2009 06:11:53 -0700 Subject: Comment tylannitride SNF 2009-03-18 14:31:13: Qual test had low deprate Message-ID: From seymour at snf.stanford.edu Tue Mar 31 09:13:52 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 31 Mar 2009 09:13:52 -0700 Subject: Comment tylannitride SNF 2009-03-31 09:13:51: oil change completed Message-ID: