From kimsangb at snf.stanford.edu Sun Nov 1 04:20:47 2009 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Sun, 1 Nov 2009 04:20:47 -0800 Subject: Problem tylannitride SNF 2009-11-01 04:20:47: computer is frozen. can not start pump10 program.. Message-ID: Computer says 'HOST TASK IN PROGRESS' and does not respond to any keyboard inputs. I can not start pump program after I am done.. From shott at snf.stanford.edu Sun Nov 1 07:47:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 1 Nov 2009 07:47:07 -0800 Subject: Problem tylannitride SNF 2009-11-01 04:20:47: computer is frozen. can not start pump10 program.. Message-ID: Reset the Tycom controller, loaded and ran pump10. I don't know what caused the tycom to freeze, but it seems to be operational now. John From egarnett at snf.stanford.edu Tue Nov 3 10:44:21 2009 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Tue, 3 Nov 2009 10:44:21 -0800 Subject: Problem tylannitride SNF 2009-11-03 10:44:20: temperature problem Message-ID: Temperature at load and pump reading 850 but center reading 450. On display temperature is reading 750. Don't know if I should continue my process or abort. Please help ASAP. Thanks. From seymour at snf.stanford.edu Tue Nov 3 12:00:40 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Nov 2009 12:00:40 -0800 Subject: Problem tylannitride SNF 2009-11-03 10:44:20: temperature problem Message-ID: replaced profile t/c with a new calibrated one. Entered correction factors in the TCU. Checked tycom display and readouts were normal and coming down after run was aborted. From seymour at snf.stanford.edu Fri Nov 6 13:48:34 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Nov 2009 13:48:34 -0800 Subject: Comment tylannitride SNF 2009-11-06 13:48:33: oil changed Message-ID: level glass cleaned. pump base pressure checked. From cursive at snf.stanford.edu Sat Nov 7 12:31:23 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 7 Nov 2009 12:31:23 -0800 Subject: Problem tylannitride SNF 2009-11-07 12:31:22: not reach the process pressure Message-ID: The original process pressure should reach 200 in Nitride2, but it is just 180. Please check the pressure controler. From tberg at snf.stanford.edu Mon Nov 9 06:48:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Nov 2009 06:48:00 -0800 Subject: Problem tylannitride SNF 2009-11-07 12:31:22: not reach the process pressure Message-ID: There is no pressure control in nitride2 recipe it depends on pump and gas flows for pressure From ericp at snf.stanford.edu Sun Nov 15 03:56:14 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 15 Nov 2009 03:56:14 -0800 Subject: Problem tylannitride SNF 2009-11-15 03:56:13: Does not close all the way Message-ID: Door seems to hang about 3cm from closing, preventing the tube from going into pump mode. From cursive at snf.stanford.edu Sun Nov 15 10:51:10 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 15 Nov 2009 10:51:10 -0800 Subject: Problem tylannitride SNF 2009-11-15 10:51:09: door can't open Message-ID: Vent the chamber and wait 25 minutes. The door still can't open. From paik at snf.stanford.edu Sun Nov 15 17:21:09 2009 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Sun, 15 Nov 2009 17:21:09 -0800 Subject: Problem tylannitride SNF 2009-11-15 17:21:08: door Message-ID: door does not open automatically door does not open manually From tberg at snf.stanford.edu Mon Nov 16 06:41:51 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Nov 2009 06:41:51 -0800 Subject: Comment tylannitride SNF 2009-10-29 15:00:52: oil changed Message-ID: noted From tberg at snf.stanford.edu Mon Nov 16 06:42:04 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Nov 2009 06:42:04 -0800 Subject: Comment tylannitride SNF 2009-11-06 13:48:33: oil changed Message-ID: noted From tberg at snf.stanford.edu Mon Nov 16 06:42:37 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Nov 2009 06:42:37 -0800 Subject: Comment tylannitride SNF 2009-11-16 06:42:36: Looks like gate valve is not sealing Message-ID: From seymour at snf.stanford.edu Mon Nov 16 08:11:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 08:11:45 -0800 Subject: Shutdown tylannitride SNF 2009-11-16 08:11:45: rebuilding gate valve Message-ID: From seymour at snf.stanford.edu Mon Nov 16 11:01:21 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:01:21 -0800 Subject: Shutdown tylannitride SNF 2009-11-16 08:11:45: rebuilding gate valve Message-ID: rebuild complete. good base and rate of rise. Vented tube with newlsn N2 flow and door opened. checked and adjusted clutch for door closure. From seymour at snf.stanford.edu Mon Nov 16 11:01:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:01:43 -0800 Subject: Problem tylannitride SNF 2009-11-15 03:56:13: Does not close all the way Message-ID: door closes now From seymour at snf.stanford.edu Mon Nov 16 11:02:11 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:02:11 -0800 Subject: Problem tylannitride SNF 2009-11-15 10:51:09: door can't open Message-ID: door opens after gate valve rebuild From seymour at snf.stanford.edu Mon Nov 16 11:02:33 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:02:33 -0800 Subject: Problem tylannitride SNF 2009-11-15 17:21:08: door Message-ID: door operating normally at this time. From seymour at snf.stanford.edu Mon Nov 16 11:03:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Nov 2009 11:03:00 -0800 Subject: Comment tylannitride SNF 2009-11-16 06:42:36: Looks like gate valve is not sealing Message-ID: gate valve rebuild done. From egarnett at snf.stanford.edu Thu Nov 19 12:09:32 2009 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Thu, 19 Nov 2009 12:09:32 -0800 Subject: Problem tylannitride SNF 2009-11-19 12:09:32: leak check failed Message-ID: came back to find my deposition run didn't work because the leak check failed. From seymour at snf.stanford.edu Thu Nov 19 13:54:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Nov 2009 13:54:16 -0800 Subject: Comment tylannitride SNF 2009-11-19 13:54:15: oil changed Message-ID: level glass cleaned From seymour at snf.stanford.edu Thu Nov 19 15:19:48 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 19 Nov 2009 15:19:48 -0800 Subject: Problem tylannitride SNF 2009-11-19 12:09:32: leak check failed Message-ID: When i went in to do the oil change the tube was in the pump recipe and pressure was normal. I have now checked the base pressure which is good at 4 mT and rate of rise was less then 10 mT/min. Tube pressure looks great. From mtan at snf.stanford.edu Sat Nov 21 21:42:32 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 21 Nov 2009 21:42:32 -0800 Subject: Problem tylannitride SNF 2009-11-21 21:42:32: door did not seal properly Message-ID: The door could not seal properly, which prevents the program from running pass step 10. From tberg at snf.stanford.edu Mon Nov 23 08:46:44 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Nov 2009 08:46:44 -0800 Subject: Comment tylannitride SNF 2009-11-23 08:46:43: Checked door seal manually Message-ID: Checked door seal manually. worked ok will leave open for observation From seymour at snf.stanford.edu Wed Nov 25 11:16:47 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Nov 2009 11:16:47 -0800 Subject: Comment tylannitride SNF 2009-11-25 11:16:47: oil change Message-ID: level glass clean From pponce at snf.stanford.edu Fri Nov 27 22:10:57 2009 From: pponce at snf.stanford.edu (pponce at snf.stanford.edu) Date: Fri, 27 Nov 2009 22:10:57 -0800 Subject: Problem tylannitride SNF 2009-11-27 22:10:57: gate valve problem Message-ID: The gate valve light on the pump10 control panel keeps flashing off and on irregularly. It's unable to keep the process pressure down. The last run (barely) passed leak check and failed before deposition. From seymour at snf.stanford.edu Mon Nov 30 08:48:46 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 30 Nov 2009 08:48:46 -0800 Subject: Problem tylannitride SNF 2009-11-27 22:10:57: gate valve problem Message-ID: pumped tiube in manual. Flowed N2 and pressure looked normal with 500 sccm of N2. base pressure was 3 mT and rate of rise was 11 mT/min. From seymour at snf.stanford.edu Mon Nov 30 08:51:57 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 30 Nov 2009 08:51:57 -0800 Subject: Comment tylannitride SNF 2009-11-30 08:51:56: checked tube base and rate of rise. Message-ID: found tube in idle with N2 flowing and a coral message tube had pump issues or gate valve issues. The tube pumped down to 3 mT after pumping N2 for a few mins and ror was about 11 mT/min.