From lindaw at snf.stanford.edu Thu Oct 8 13:14:48 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 8 Oct 2009 13:14:48 -0700 Subject: Problem tylannitride SNF 2009-10-08 13:14:48: tylan 10 & tylan 7 both aborted out of pump programs Message-ID: tylan 7 & tylan 10 both aborted out of their pump programs with alarm at step end. From seymour at snf.stanford.edu Thu Oct 8 14:07:22 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:07:22 -0700 Subject: Problem tylannitride SNF 2009-10-08 13:14:48: tylan 10 & tylan 7 both aborted out of pump programs Message-ID: I started pump recipe in both tubes and they went to step 25. I then checked base and rate of rise and both were ok. From seymour at snf.stanford.edu Fri Oct 9 15:02:04 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Oct 2009 15:02:04 -0700 Subject: Comment tylannitride SNF 2009-10-09 15:02:03: oil changed Message-ID: From jpadovani at snf.stanford.edu Fri Oct 9 15:46:55 2009 From: jpadovani at snf.stanford.edu (jpadovani at snf.stanford.edu) Date: Fri, 9 Oct 2009 15:46:55 -0700 Subject: Problem tylannitride SNF 2009-10-09 15:46:55: No nitride deposition Message-ID: Ran newlsn recipe with 20 min deposition time. Process finished normally but no nitride was deposited. From seymour at snf.stanford.edu Fri Oct 9 16:02:30 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Oct 2009 16:02:30 -0700 Subject: Comment tylannitride SNF 2009-10-09 16:02:29: checked tube operation Message-ID: base good leak rate med high but tube was open for about 45 mins. Dichlor and ammonia supply pressures good, both flowed to setpoint during my test. No reason for not depositing nitride on previous run found. From jpadovani at snf.stanford.edu Sat Oct 10 00:28:55 2009 From: jpadovani at snf.stanford.edu (jpadovani at snf.stanford.edu) Date: Sat, 10 Oct 2009 00:28:55 -0700 Subject: Comment tylannitride SNF 2009-10-10 00:28:55: Good deposition Message-ID: Complete process run with good deposition. Previous problem reported for no deposition was probably as a result of a failed leak check that aborted the sequence before the deposition step. From rik at snf.stanford.edu Sat Oct 10 20:36:35 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sat, 10 Oct 2009 20:36:35 -0700 Subject: Problem tylannitride SNF 2009-10-10 20:36:35: Tube not pumping down in PUMP10 Message-ID: Tried to run PUMP10 program 3 times. Pressure reduces to 1200 in step 10 and stops, causing program to error out at the end of the step. From aessawi at snf.stanford.edu Sun Oct 11 22:18:19 2009 From: aessawi at snf.stanford.edu (aessawi at snf.stanford.edu) Date: Sun, 11 Oct 2009 22:18:19 -0700 Subject: Problem tylannitride SNF 2009-10-11 22:18:18: Tube not pumping Message-ID: I tried to load PUMP10 program 5 times but it aqlways abort. From tberg at snf.stanford.edu Mon Oct 12 06:38:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Oct 2009 06:38:53 -0700 Subject: Shutdown tylannitride SNF 2009-10-12 06:38:51: leak Message-ID: From seymour at snf.stanford.edu Mon Oct 12 14:49:55 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 12 Oct 2009 14:49:55 -0700 Subject: Comment tylannitride SNF 2009-10-12 14:49:55: tube won't pump Message-ID: Pulled and replaced tube and orings. Replaced loader door gasket. The gas ring orings were melted due to loader being out for a long period on friday afternoon. Tube passed cold leak check and base pressure check. It is heating up in the pump recipe and will need a coat in the morning. From tberg at snf.stanford.edu Tue Oct 13 09:17:25 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Oct 2009 09:17:25 -0700 Subject: Comment tylannitride SNF 2009-10-13 09:17:25: Coat completed needs test Message-ID: From ludwig at snf.stanford.edu Tue Oct 13 16:01:33 2009 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Tue, 13 Oct 2009 16:01:33 -0700 Subject: Comment tylannitride SNF 2009-10-13 16:01:33: test in progress Message-ID: we are still testing the tube, Wed. morning will run another test and leave the data in the log book From seymour at snf.stanford.edu Wed Oct 14 09:05:23 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Oct 2009 09:05:23 -0700 Subject: Comment tylannitride SNF 2009-10-14 09:05:23: running a system test Message-ID: I am running newlsn to check for correct operation due to the low test results obtained yesterday. If all goes ok then another calibration will be done for thickness. From latta at snf.stanford.edu Wed Oct 14 16:05:44 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:05:44 -0700 Subject: Comment tylannitride SNF 2009-10-14 09:05:23: running a system test Message-ID: operation good. From latta at snf.stanford.edu Wed Oct 14 16:06:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:06:07 -0700 Subject: Comment tylannitride SNF 2009-10-13 16:01:33: test in progress Message-ID: morning test completed. From latta at snf.stanford.edu Wed Oct 14 16:06:27 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:06:27 -0700 Subject: Comment tylannitride SNF 2009-10-13 09:17:25: Coat completed needs test Message-ID: test completed From latta at snf.stanford.edu Wed Oct 14 16:06:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:06:48 -0700 Subject: Comment tylannitride SNF 2009-10-12 14:49:55: tube won't pump Message-ID: good now. From latta at snf.stanford.edu Wed Oct 14 16:07:03 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:07:03 -0700 Subject: Shutdown tylannitride SNF 2009-10-12 06:38:51: leak Message-ID: leak fixed. From latta at snf.stanford.edu Wed Oct 14 16:07:22 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:07:22 -0700 Subject: Problem tylannitride SNF 2009-10-11 22:18:18: Tube not pumping Message-ID: ok after fix From latta at snf.stanford.edu Wed Oct 14 16:07:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:07:38 -0700 Subject: Problem tylannitride SNF 2009-10-10 20:36:35: Tube not pumping down in PUMP10 Message-ID: ok after fix From latta at snf.stanford.edu Wed Oct 14 16:07:56 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:07:56 -0700 Subject: Comment tylannitride SNF 2009-10-10 00:28:55: Good deposition Message-ID: thanks From latta at snf.stanford.edu Wed Oct 14 16:08:18 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:08:18 -0700 Subject: Comment tylannitride SNF 2009-10-09 16:02:29: checked tube operation Message-ID: archived From latta at snf.stanford.edu Wed Oct 14 16:08:34 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:08:34 -0700 Subject: Problem tylannitride SNF 2009-10-09 15:46:55: No nitride deposition Message-ID: depositing fine now From latta at snf.stanford.edu Wed Oct 14 16:08:56 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:08:56 -0700 Subject: Comment tylannitride SNF 2009-09-27 22:12:04: didn't need to push door. Message-ID: archived From latta at snf.stanford.edu Wed Oct 14 16:09:27 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:09:27 -0700 Subject: Comment tylannitride SNF 2009-09-28 11:32:17: tube is venting properly Message-ID: archived From latta at snf.stanford.edu Wed Oct 14 16:09:59 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:09:59 -0700 Subject: Comment tylannitride SNF 2009-10-09 15:02:03: oil changed Message-ID: archived From latta at snf.stanford.edu Thu Oct 15 17:11:56 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Oct 2009 17:11:56 -0700 Subject: Comment tylannitride SNF 2009-10-15 17:11:55: Qual after pull&clean Message-ID: NEWLSN 00:45:00 Front = 2790A, Std Dev = 86.6, RI= 2.4 Front Center = 2775A, Std Dev = 74.8, IR= 2.4 Back Center = 2487A, Std Dev = 43.8, IR= 2.4 Back= 2393A, Std Dev= 89.3, IR=2.4 Average All = 2611A Dep rate = 58A/min From tberg at snf.stanford.edu Tue Oct 20 06:03:00 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Oct 2009 06:03:00 -0700 Subject: Shutdown tylannitride SNF 2009-10-20 06:03:00: DCS cabinet Mod Message-ID: From tberg at snf.stanford.edu Fri Oct 23 13:50:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 13:50:30 -0700 Subject: Shutdown tylannitride SNF 2009-10-20 06:03:00: DCS cabinet Mod Message-ID: DCS cabinet mod completed DCS back on to all tools flows checked. User wants to run his wafers as a test. From tberg at snf.stanford.edu Fri Oct 23 13:51:16 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 23 Oct 2009 13:51:16 -0700 Subject: Problem tylannitride SNF 2009-10-23 13:51:15: DCS mod done Message-ID: DCS cabinet mod completed DCS back on to all tools flows checked. User wants to run his wafers as a test From seymour at snf.stanford.edu Fri Oct 23 15:34:38 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 23 Oct 2009 15:34:38 -0700 Subject: Comment tylannitride SNF 2009-10-23 15:34:38: oil changed Message-ID: site glass cleaned and fresh oil added From latta at snf.stanford.edu Fri Oct 23 19:40:39 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 23 Oct 2009 19:40:39 -0700 Subject: Problem tylannitride SNF 2009-10-23 13:51:15: DCS mod done Message-ID: qual completed- see comments From paik at snf.stanford.edu Sun Oct 25 18:33:59 2009 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Sun, 25 Oct 2009 18:33:59 -0700 Subject: Problem tylannitride SNF 2009-10-25 18:33:59: boat out not automatic Message-ID: boat did not come out on its own. manual load and the subsequent run went well. From tberg at snf.stanford.edu Mon Oct 26 06:24:15 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Oct 2009 06:24:15 -0700 Subject: Shutdown tylannitride SNF 2009-10-26 06:24:14: DCS issues Message-ID: From seymour at snf.stanford.edu Mon Oct 26 08:33:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 26 Oct 2009 08:33:16 -0700 Subject: Problem tylannitride SNF 2009-10-25 18:33:59: boat out not automatic Message-ID: vented tube and loaded newlsn and started recipe. Tube opened and completely pulled. pushed alarm ack and loader went in and the tube pumped down. No loader out problems found. User may have not given enought time for the tube to reach atmosphere. From tberg at snf.stanford.edu Mon Oct 26 10:03:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Oct 2009 10:03:13 -0700 Subject: Shutdown tylannitride SNF 2009-10-26 06:24:14: DCS issues Message-ID: Replaced purge panel on epi side4 From amroy at snf.stanford.edu Mon Oct 26 17:32:31 2009 From: amroy at snf.stanford.edu (amroy at snf.stanford.edu) Date: Mon, 26 Oct 2009 17:32:31 -0700 Subject: Problem tylannitride SNF 2009-10-26 17:32:30: MFS alarm Message-ID: MFS alarm sounded during the deposition step. Deposition was completed after acknowledging the alarm. Low process pressure (67.4) was noted. From tberg at snf.stanford.edu Tue Oct 27 07:44:40 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Oct 2009 07:44:40 -0700 Subject: Comment tylannitride SNF 2009-10-27 07:44:39: Found broken air line Message-ID: Found broken air line to nupro valves. might have caused the problem will leave open for observation. Checked flows manually no issues From latta at snf.stanford.edu Tue Oct 27 11:52:17 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Oct 2009 11:52:17 -0700 Subject: Comment tylannitride SNF 2009-10-27 11:52:17: Qual after DCS line modification Message-ID: NEWLSN 00:20:00 Front = 978A, Std Dev = 19.4, RI= 2.3 Front Center = 998A, Std Dev = 16.7, IR= 2.3 Back Center = 1051A, Std Dev = 24.0, IR= 2.3 Back= 1086A, Std Dev= 16.0, IR=2.3 Average All = 1028A Dep rate = 51A/min Slightly less dep rate, refractive index lower ( 2.3 vs 2.4) than last qual. From latta at snf.stanford.edu Tue Oct 27 11:53:20 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Oct 2009 11:53:20 -0700 Subject: Comment tylannitride SNF 2009-10-15 17:11:55: Qual after pull&clean Message-ID: archived From latta at snf.stanford.edu Tue Oct 27 11:58:31 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Oct 2009 11:58:31 -0700 Subject: Comment tylannitride SNF 2009-10-23 15:34:38: oil changed Message-ID: archived From cursive at snf.stanford.edu Wed Oct 28 21:21:52 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 28 Oct 2009 21:21:52 -0700 Subject: Problem tylannitride SNF 2009-10-28 21:21:51: tube door can't close well Message-ID: From seymour at snf.stanford.edu Thu Oct 29 08:38:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Oct 2009 08:38:16 -0700 Subject: Problem tylannitride SNF 2009-10-28 21:21:51: tube door can't close well Message-ID: checked loader and door for correct aloignment. found door center bolt slightly loose allowing door to tilt slightly, tightened and operated loader manually and tube pumped down. loaded recipe and pushed run. loader pulled and then pushed normally. the tube pumped down to base. I reloaded pump10 and pushed run. From tberg at snf.stanford.edu Thu Oct 29 13:21:27 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 13:21:27 -0700 Subject: Problem tylannitride SNF 2009-10-26 17:32:30: MFS alarm Message-ID: Several runs since no problem From tberg at snf.stanford.edu Thu Oct 29 13:21:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 29 Oct 2009 13:21:39 -0700 Subject: Comment tylannitride SNF 2009-10-27 07:44:39: Found broken air line Message-ID: Several runs since no problem From seymour at snf.stanford.edu Thu Oct 29 15:00:53 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Oct 2009 15:00:53 -0700 Subject: Comment tylannitride SNF 2009-10-29 15:00:52: oil changed Message-ID: