From seymour at snf.stanford.edu Fri Sep 4 15:46:20 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Sep 2009 15:46:20 -0700 Subject: Comment tylannitride SNF 2009-09-04 15:46:19: oil and filter changed Message-ID: From tberg at snf.stanford.edu Thu Sep 17 06:02:18 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Sep 2009 06:02:18 -0700 Subject: Shutdown tylannitride SNF 2009-09-17 06:02:17: pull and clean Message-ID: From tberg at snf.stanford.edu Thu Sep 17 14:18:46 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:18:46 -0700 Subject: Comment tylannitride SNF 2009-07-29 09:15:06: oil and filter change Message-ID: noted From tberg at snf.stanford.edu Thu Sep 17 14:19:01 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:19:01 -0700 Subject: Comment tylannitride SNF 2009-08-07 14:44:40: oil and filters changed Message-ID: noted From tberg at snf.stanford.edu Thu Sep 17 14:19:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:19:13 -0700 Subject: Comment tylannitride SNF 2009-09-04 15:46:19: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Thu Sep 17 14:20:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:20:39 -0700 Subject: Comment tylannitride SNF 2009-09-17 14:20:39: Tube is changed Message-ID: Tube is changed. new cantilever head installed, leak checking From tberg at snf.stanford.edu Fri Sep 18 09:51:31 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 Sep 2009 09:51:31 -0700 Subject: Comment tylannitride SNF 2009-09-18 09:51:31: Tube reassembled, leak good Message-ID: Tube reassembled, leak good. At temp running Nitride2 for 40 min for coat From maurice at snf.stanford.edu Fri Sep 18 11:41:33 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Sep 2009 11:41:33 -0700 Subject: Comment tylannitride SNF 2009-09-18 11:41:33: testing after pull Message-ID: From maurice at snf.stanford.edu Fri Sep 18 15:28:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Sep 2009 15:28:47 -0700 Subject: Comment tylannitride SNF 2009-09-18 11:41:33: testing after pull Message-ID: Test complete Newlan 00:15:00 expected ~1200 anh actual 1122 From maurice at snf.stanford.edu Fri Sep 18 15:29:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Sep 2009 15:29:16 -0700 Subject: Comment tylannitride SNF 2009-09-18 09:51:31: Tube reassembled, leak good Message-ID: logged From maurice at snf.stanford.edu Fri Sep 18 15:29:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Sep 2009 15:29:24 -0700 Subject: Comment tylannitride SNF 2009-09-17 14:20:39: Tube is changed Message-ID: logged From maurice at snf.stanford.edu Fri Sep 18 15:29:54 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Sep 2009 15:29:54 -0700 Subject: Shutdown tylannitride SNF 2009-09-17 06:02:17: pull and clean Message-ID: pulled, cleaned, coated and tested. Test complete Newlan 00:15:00 expected ~1200 anh actual 1122 From ericp at snf.stanford.edu Thu Sep 24 18:47:08 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 24 Sep 2009 18:47:08 -0700 Subject: Problem tylannitride SNF 2009-09-24 18:47:07: door is not closing all the way on its own Message-ID: The door "almost" closes, but then fails to allow pump down. From seymour at snf.stanford.edu Fri Sep 25 09:53:22 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Sep 2009 09:53:22 -0700 Subject: Problem tylannitride SNF 2009-09-24 18:47:07: door is not closing all the way on its own Message-ID: cleaned the slow pump valve and adjusted the door. checked pump down and it caught the door and pumped the tube. From mtan at snf.stanford.edu Fri Sep 25 11:45:29 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 25 Sep 2009 11:45:29 -0700 Subject: Problem tylannitride SNF 2009-09-25 11:45:29: door won't shut automatically Message-ID: Need to manually push the door to a close before step 15 can proceed. From dalyx at snf.stanford.edu Sun Sep 27 22:12:05 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Sun, 27 Sep 2009 22:12:05 -0700 Subject: Comment tylannitride SNF 2009-09-27 22:12:04: didn't need to push door. Message-ID: program went to step 20 without need to push door. From dalyx at snf.stanford.edu Mon Sep 28 01:25:57 2009 From: dalyx at snf.stanford.edu (dalyx at snf.stanford.edu) Date: Mon, 28 Sep 2009 01:25:57 -0700 Subject: Problem tylannitride SNF 2009-09-28 01:25:56: Tube not venting Message-ID: Finished running Nitride2 recipe, and waited to vent but tube never came out. Couldn't get the tube to come out manually either. From seymour at snf.stanford.edu Mon Sep 28 11:31:38 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Sep 2009 11:31:38 -0700 Subject: Problem tylannitride SNF 2009-09-28 01:25:56: Tube not venting Message-ID: gate valve leaking. Tube closes and pumps down without assistance. Vented tube and door opened. checked twice with pump recipe. From seymour at snf.stanford.edu Mon Sep 28 11:32:18 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Sep 2009 11:32:18 -0700 Subject: Comment tylannitride SNF 2009-09-28 11:32:17: tube is venting properly Message-ID: Prior users wafers may be in tube. From seymour at snf.stanford.edu Mon Sep 28 11:32:52 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Sep 2009 11:32:52 -0700 Subject: Problem tylannitride SNF 2009-09-25 11:45:29: door won't shut automatically Message-ID: door sealed three times in a row.