From tberg at snf.stanford.edu Tue Aug 3 06:55:31 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2010 06:55:31 -0700 Subject: Shutdown tylannitride SNF 2010-08-03 06:55:30: Pump is dead Message-ID: From tberg at snf.stanford.edu Tue Aug 3 06:55:48 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2010 06:55:48 -0700 Subject: Comment tylannitride SNF 2010-06-10 08:30:22: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Aug 3 06:55:58 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2010 06:55:58 -0700 Subject: Comment tylannitride SNF 2010-06-28 14:00:47: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Aug 3 06:56:17 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 3 Aug 2010 06:56:17 -0700 Subject: Comment tylannitride SNF 2010-07-09 08:14:21: oil changed Message-ID: noted From seymour at snf.stanford.edu Tue Aug 3 10:09:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:09:28 -0700 Subject: Shutdown tylannitride SNF 2010-08-03 06:55:30: Pump is dead Message-ID: pump replaced. base good and ROR is good. needs testing From seymour at snf.stanford.edu Tue Aug 3 10:10:07 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:10:07 -0700 Subject: Problem tylannitride SNF 2010-08-03 10:10:07: needs testing after pump replacement Message-ID: From maurice at snf.stanford.edu Tue Aug 3 10:58:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:58:25 -0700 Subject: Shutdown tylannitride SNF 2010-08-03 10:58:24: running test after pump change Message-ID: Running nitride2 00:30:00 From maurice at snf.stanford.edu Tue Aug 3 14:24:52 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2010 14:24:52 -0700 Subject: Shutdown tylannitride SNF 2010-08-03 10:58:24: running test after pump change Message-ID: Nitride2 00:30:00 expected~1250 ang system up t 1330 tc 1296 c 1286 bc 1289 b 1302 l 1312 lc 1292 rc 1296 r 1322 From maurice at snf.stanford.edu Tue Aug 3 14:25:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 3 Aug 2010 14:25:15 -0700 Subject: Problem tylannitride SNF 2010-08-03 10:10:07: needs testing after pump replacement Message-ID: test complete see coral for results From maurice at snf.stanford.edu Wed Aug 4 09:20:16 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 4 Aug 2010 09:20:16 -0700 Subject: Shutdown tylannitride SNF 2010-08-04 09:20:15: pump off Message-ID: Ofer Levi reported that he could not run last night because system wouldn't pump From tberg at snf.stanford.edu Wed Aug 4 10:01:48 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 4 Aug 2010 10:01:48 -0700 Subject: Shutdown tylannitride SNF 2010-08-04 09:20:15: pump off Message-ID: Pump is on and has been running pump 10 for 4 hours. will put i n yellow for observation From tberg at snf.stanford.edu Wed Aug 4 10:02:04 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 4 Aug 2010 10:02:04 -0700 Subject: Problem tylannitride SNF 2010-08-04 10:02:03: possible pump issues Message-ID: From hector at snf.stanford.edu Wed Aug 4 23:20:59 2010 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Wed, 4 Aug 2010 23:20:59 -0700 Subject: Problem tylannitride SNF 2010-08-04 23:20:58: boat rail scraping tube Message-ID: I did one run and noticed that when the boats are coming out that the cantilevered rail is not centered within the tube. The baffle shields smaked the tube opening on the way in and scrapped the tube wall all the way down. Don't use the tube until maintenace can fix. Wasn't sure if this should be a full shutdown. From hector at snf.stanford.edu Wed Aug 4 23:33:16 2010 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Wed, 4 Aug 2010 23:33:16 -0700 Subject: Shutdown tylannitride SNF 2010-08-04 23:33:16: Cantilever rail prob cont. Message-ID: See the immediately preceding probelm report. The cantilever arm is loose on the lead rail and the baffles are scraping the tube. I held the cantilered rail as I manually drove it into the tube so it wouldn't scrape. The rail is hanging downward and to the left. I shut it down. From seymour at snf.stanford.edu Fri Aug 6 15:21:07 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 Aug 2010 15:21:07 -0700 Subject: Problem tylannitride SNF 2010-08-06 15:21:06: pulling tube for replacement Message-ID: I will complete the pull on Monday From seymour at snf.stanford.edu Tue Aug 10 14:06:59 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:06:59 -0700 Subject: Shutdown tylannitride SNF 2010-08-04 23:33:16: Cantilever rail prob cont. Message-ID: pull and clean completed. passed cold and hot leak check. running newlsn coat at this time. will need test after coat completed. From seymour at snf.stanford.edu Tue Aug 10 14:07:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:07:26 -0700 Subject: Problem tylannitride SNF 2010-08-06 15:21:06: pulling tube for replacement Message-ID: tube pull and clean complete From seymour at snf.stanford.edu Tue Aug 10 14:07:52 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:07:52 -0700 Subject: Problem tylannitride SNF 2010-08-04 23:20:58: boat rail scraping tube Message-ID: loader is in center of tube From seymour at snf.stanford.edu Tue Aug 10 14:08:45 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:08:45 -0700 Subject: Problem tylannitride SNF 2010-08-04 10:02:03: possible pump issues Message-ID: pump was replaced From seymour at snf.stanford.edu Tue Aug 10 14:09:11 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:09:11 -0700 Subject: Problem tylannitride SNF 2010-08-10 14:09:10: needs test after coat complete Message-ID: From cursive at snf.stanford.edu Tue Aug 10 21:52:27 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 10 Aug 2010 21:52:27 -0700 Subject: Problem tylannitride SNF 2010-08-10 21:52:26: vent problem Message-ID: It takes 30-40 mins to vent the chamber from pump10 recipe. From seymour at snf.stanford.edu Wed Aug 11 07:57:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Aug 2010 07:57:51 -0700 Subject: Comment tylannitride SNF 2010-08-11 07:57:49: rebuilding vac valve Message-ID: From seymour at snf.stanford.edu Wed Aug 11 10:20:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Aug 2010 10:20:28 -0700 Subject: Problem tylannitride SNF 2010-08-10 21:52:26: vent problem Message-ID: slo pump section of vac valve was not sealing. valve rebuit and operation checked. base pressure good leaqqk rate good. tube vents correctly. From seymour at snf.stanford.edu Wed Aug 11 10:21:54 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 11 Aug 2010 10:21:54 -0700 Subject: Comment tylannitride SNF 2010-08-11 07:57:49: rebuilding vac valve Message-ID: rebuild done. From maurice at snf.stanford.edu Wed Aug 11 10:34:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Aug 2010 10:34:21 -0700 Subject: Problem tylannitride SNF 2010-08-10 14:09:10: needs test after coat complete Message-ID: Cursive ran NITRIDE2 and expected 220A and got ~215. Dep rate looks good. Process pressure ~195mtorr with new pump/tube. From seymour at snf.stanford.edu Fri Aug 13 08:06:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 13 Aug 2010 08:06:22 -0700 Subject: Comment tylannitride SNF 2010-08-13 08:06:22: oil changed Message-ID: level glass cleaned From maurice at snf.stanford.edu Thu Aug 19 18:49:40 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Aug 2010 18:49:40 -0700 Subject: Problem tylannitride SNF 2010-08-19 18:49:40: door not closing Message-ID: Door open with no problem. But does not not at all when closing...motor is turning put the loading not moving. From seymour at snf.stanford.edu Fri Aug 20 08:50:12 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 20 Aug 2010 08:50:12 -0700 Subject: Problem tylannitride SNF 2010-08-19 18:49:40: door not closing Message-ID: replaced faulty loader motor. checked o0peration in both directions. From seymour at snf.stanford.edu Mon Aug 23 15:11:48 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 23 Aug 2010 15:11:48 -0700 Subject: Shutdown tylannitride SNF 2010-08-23 15:11:48: pump thermal tripped off Message-ID: From seymour at snf.stanford.edu Wed Aug 25 10:22:48 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 10:22:48 -0700 Subject: Shutdown tylannitride SNF 2010-08-23 15:11:48: pump thermal tripped off Message-ID: pump replaced. good base and ROR. needs testing after repair From seymour at snf.stanford.edu Wed Aug 25 10:23:09 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 10:23:09 -0700 Subject: Shutdown tylannitride SNF 2010-08-25 10:23:09: needs testing after pump replacement Message-ID: From seymour at snf.stanford.edu Wed Aug 25 10:43:04 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 10:43:04 -0700 Subject: Problem tylannitride SNF 2010-08-25 10:43:03: being tested Message-ID: From seymour at snf.stanford.edu Wed Aug 25 10:43:25 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Aug 2010 10:43:25 -0700 Subject: Shutdown tylannitride SNF 2010-08-25 10:23:09: needs testing after pump replacement Message-ID: being tested From maurice at snf.stanford.edu Fri Aug 27 17:23:18 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 27 Aug 2010 17:23:18 -0700 Subject: Shutdown tylannitride SNF 2010-08-27 17:23:18: pump failure Message-ID: Tube was in pumpdown step (before leak check) of nitride2 program Smoke in back service area and oil squirting on the floor at the back of the Tylan pump cabinet. Program was aborted, pump was turned off and system red lighted From tberg at snf.stanford.edu Mon Aug 30 11:44:34 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Aug 2010 11:44:34 -0700 Subject: Shutdown tylannitride SNF 2010-08-27 17:23:18: pump failure Message-ID: ran pump both in manual and auto no oil leaks. Ran pump 10 for 2 hours no problem. needs test From maurice at snf.stanford.edu Mon Aug 30 14:18:16 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Aug 2010 14:18:16 -0700 Subject: Comment tylannitride SNF 2010-08-30 14:18:15: running test Message-ID: NEWLSN 00:15:00 From maurice at snf.stanford.edu Mon Aug 30 17:45:38 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Aug 2010 17:45:38 -0700 Subject: Comment tylannitride SNF 2010-08-30 14:18:15: running test Message-ID: NEWLSN 00:15:00 Expected ~1150 Ang Actual 1211 Dep rate ok From maurice at snf.stanford.edu Mon Aug 30 17:46:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Aug 2010 17:46:02 -0700 Subject: Problem tylannitride SNF 2010-08-25 10:43:03: being tested Message-ID: NEWLSN 00:15:00 Expected ~1150 Ang Actual 1211 From shott at snf.stanford.edu Tue Aug 31 06:25:21 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 31 Aug 2010 06:25:21 -0700 Subject: Shutdown tylannitride SNF 2010-08-31 06:25:20: Pump oil everywhere .... Message-ID: This morning there is pump oil all over the floor behind the pump end of the tylan nitride pump and the level of the oil in the sight glass is only about 1 cm above the minimum line. As of about 5 p.m. last evening, it was only about 1 cm below the upper line .... I can't quite remember why I was looking in there, but I was. While I don't know that it is related, I found that the oil circulator was on even though only the outlet of the circulator was connected and the return line was disconnected. While I can't be certainly, this is clearly wrong. My guess is that it pumped the fluid out of the filter unit and may have been pressurizing the crankcase of the pump which, of course, would have exacerbated any oil leakage. There is enough oil on everything that it is difficult to identify the source of the leak. We need a clear policy and procedure as to whether we are going to use pump filtration or not and then follow through carefully on that. John