Problem tylannitride SNF 2010-08-10 14:09:10: needs test after coat complete

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Aug 11 10:34:21 PDT 2010


Cursive ran NITRIDE2 and expected 220A and got  ~215.  Dep rate looks good.  Process pressure ~195mtorr with new pump/tube.




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