Problem tylannitride SNF 2010-08-10 14:09:10: needs test after coat complete
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Aug 11 10:34:21 PDT 2010
Cursive ran NITRIDE2 and expected 220A and got ~215. Dep rate looks good. Process pressure ~195mtorr with new pump/tube.
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