From maurice at snf.stanford.edu Mon Feb 1 08:03:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 1 Feb 2010 08:03:48 -0800 Subject: Problem tylannitride SNF 2010-01-31 14:01:31: just one dummy wafer inside Message-ID: added two dummies From tberg at snf.stanford.edu Tue Feb 2 12:51:06 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Feb 2010 12:51:06 -0800 Subject: Comment tylannitride SNF 2009-11-19 13:54:15: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 2 12:51:16 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Feb 2010 12:51:16 -0800 Subject: Comment tylannitride SNF 2009-11-25 11:16:47: oil change Message-ID: noted From tberg at snf.stanford.edu Tue Feb 2 12:51:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Feb 2010 12:51:27 -0800 Subject: Comment tylannitride SNF 2010-01-08 15:54:45: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Feb 2 12:51:44 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Feb 2010 12:51:44 -0800 Subject: Comment tylannitride SNF 2010-01-15 14:23:06: oil changed Message-ID: noted From cursive at snf.stanford.edu Thu Feb 4 20:50:13 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 4 Feb 2010 20:50:13 -0800 Subject: Problem tylannitride SNF 2010-02-04 20:50:12: MFC alarm Message-ID: Running pump10, but shows MFC alarm. Chamber stop pumping. From seymour at snf.stanford.edu Fri Feb 5 07:57:12 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Feb 2010 07:57:12 -0800 Subject: Problem tylannitride SNF 2010-02-04 20:50:12: MFC alarm Message-ID: running pump10 this morning. From seymour at snf.stanford.edu Fri Feb 5 07:58:26 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Feb 2010 07:58:26 -0800 Subject: Comment tylannitride SNF 2010-02-05 07:58:26: oil changed Message-ID: level glass cleaned. From tberg at snf.stanford.edu Tue Feb 9 05:58:21 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 9 Feb 2010 05:58:21 -0800 Subject: Shutdown tylannitride SNF 2010-02-09 05:58:21: Pull and clean Message-ID: From tberg at snf.stanford.edu Wed Feb 10 10:08:07 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Feb 2010 10:08:07 -0800 Subject: Comment tylannitride SNF 2010-02-10 10:08:06: Coat in progress Message-ID: Coat in progress base and leak rate good. Will need a test From maurice at snf.stanford.edu Wed Feb 10 14:33:03 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 14:33:03 -0800 Subject: Comment tylannitride SNF 2010-02-10 10:08:06: Coat in progress Message-ID: needs test From maurice at snf.stanford.edu Wed Feb 10 14:33:20 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 14:33:20 -0800 Subject: Shutdown tylannitride SNF 2010-02-09 05:58:21: Pull and clean Message-ID: coat complete needs test From maurice at snf.stanford.edu Wed Feb 10 14:34:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Feb 2010 14:34:21 -0800 Subject: Problem tylannitride SNF 2010-02-10 14:34:20: Needs a test Message-ID: Pull and clean complete...needs a test From seymour at snf.stanford.edu Wed Feb 10 15:16:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Feb 2010 15:16:23 -0800 Subject: Shutdown tylannitride SNF 2010-02-10 15:16:23: not sealing door at pumpdown Message-ID: The door must be pushed in to get pumpdown to start. From seymour at snf.stanford.edu Thu Feb 11 08:54:01 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Feb 2010 08:54:01 -0800 Subject: Shutdown tylannitride SNF 2010-02-10 15:16:23: not sealing door at pumpdown Message-ID: door adjusted to allow it to seal properly. Good base and ROR. Needs testing after pull and clean. From maurice at snf.stanford.edu Thu Feb 11 13:54:22 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Feb 2010 13:54:22 -0800 Subject: Problem tylannitride SNF 2010-02-10 14:34:20: Needs a test Message-ID: Ran NewLSN 00:15:00 axpected ~1200 ang Actual 1075 go to go From seymour at snf.stanford.edu Fri Feb 19 08:09:36 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Feb 2010 08:09:36 -0800 Subject: Comment tylannitride SNF 2010-02-19 08:09:36: oil changed Message-ID: level glass cleaned From bchui at snf.stanford.edu Sun Feb 28 15:35:07 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 28 Feb 2010 15:35:07 -0800 Subject: Problem tylannitride SNF 2010-02-28 15:35:06: Leaky door Message-ID: Failed leak check the first time. Upon second try, had to push the door in to make seal before the whistling sound of the air leak stopped (and the run proceeded fine).