From maurice at snf.stanford.edu Mon Jan 4 15:45:46 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:45:46 -0800 Subject: Comment tylannitride SNF 2010-01-04 15:45:46: Test in tube...results Tues morning Message-ID: From maurice at snf.stanford.edu Mon Jan 4 15:50:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:50:26 -0800 Subject: Shutdown tylannitride SNF 2010-01-04 15:50:25: Test in tube Message-ID: Will unload Tues morning From maurice at snf.stanford.edu Tue Jan 5 09:28:07 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Jan 2010 09:28:07 -0800 Subject: Problem tylannitride SNF 2010-01-05 09:28:07: Qual has bad iniformity Message-ID: newlsn 00:15:00 expected 1150Ang Actual 1209 (center) Will run a second test. 1350,1242,1209,1214,1275,1306,1223,1241,1357 From maurice at snf.stanford.edu Tue Jan 5 15:49:08 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 5 Jan 2010 15:49:08 -0800 Subject: Comment tylannitride SNF 2010-01-05 15:49:08: 2nd test bad uniformity Message-ID: newlsn 00:15:00 expected 1150Ang Actual 1100 (center) - 1189,1116,1100,1101,1139,1167,1107,1116,1194 From maurice at snf.stanford.edu Wed Jan 6 11:24:57 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jan 2010 11:24:57 -0800 Subject: Comment tylannitride SNF 2010-01-06 11:24:57: 3rd test uniformity high Message-ID: newlsn 00:15:00 expected 1150Ang Actual 1092 (center) - 1178,1109,1092,1097,1123,1130,1096,1112,1198 Top is thick, center is not bad. From maurice at snf.stanford.edu Wed Jan 6 11:25:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Jan 2010 11:25:26 -0800 Subject: Shutdown tylannitride SNF 2010-01-04 15:50:25: Test in tube Message-ID: test complete From seymour at snf.stanford.edu Thu Jan 7 09:55:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Jan 2010 09:55:31 -0800 Subject: Comment tylannitride SNF 2010-01-07 09:55:31: lowered loader Message-ID: loader sitting approx 3/16 lower in tube. From maurice at snf.stanford.edu Thu Jan 7 13:50:06 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Jan 2010 13:50:06 -0800 Subject: Problem tylannitride SNF 2010-01-05 09:28:07: Qual has bad iniformity Message-ID: After Ray lowered the loader uniformity improved newlsn 00:15:00 expected 1090 actual 1079 1139,1091,1079,1081,1102,1125,1086,1091,1155 uniformity 3.4% std dev 27.6 From seymour at snf.stanford.edu Fri Jan 8 15:54:46 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Jan 2010 15:54:46 -0800 Subject: Comment tylannitride SNF 2010-01-08 15:54:45: oil changed Message-ID: From seymour at snf.stanford.edu Fri Jan 15 14:23:06 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Jan 2010 14:23:06 -0800 Subject: Comment tylannitride SNF 2010-01-15 14:23:06: oil changed Message-ID: level glass cleaned From maurice at snf.stanford.edu Tue Jan 19 09:51:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 09:51:21 -0800 Subject: Shutdown tylannitride SNF 2010-01-19 09:51:20: heating up after power outage Message-ID: From maurice at snf.stanford.edu Tue Jan 19 15:17:45 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:17:45 -0800 Subject: Shutdown tylannitride SNF 2010-01-19 09:51:20: heating up after power outage Message-ID: at temp From maurice at snf.stanford.edu Tue Jan 19 15:17:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 19 Jan 2010 15:17:54 -0800 Subject: Problem tylannitride SNF 2010-01-19 15:17:53: needs test after power outage Message-ID: From maurice at snf.stanford.edu Wed Jan 20 15:34:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 20 Jan 2010 15:34:59 -0800 Subject: Problem tylannitride SNF 2010-01-19 15:17:53: needs test after power outage Message-ID: Ludwig: Test complete Newlsn 00:15:00 expected `1200 actual 1400 Dep rate a lttle higher than previous test From seymour at snf.stanford.edu Wed Jan 27 09:01:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jan 2010 09:01:31 -0800 Subject: Comment tylannitride SNF 2010-01-27 09:01:30: oil changed Message-ID: level glass cleaned From cursive at snf.stanford.edu Sun Jan 31 14:01:31 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 31 Jan 2010 14:01:31 -0800 Subject: Problem tylannitride SNF 2010-01-31 14:01:31: just one dummy wafer inside Message-ID: It's supposed to two or more dummy wafers inside.