From seymour at snf.stanford.edu Mon Mar 1 11:15:29 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 1 Mar 2010 11:15:29 -0800 Subject: Problem tylannitride SNF 2010-02-28 15:35:06: Leaky door Message-ID: found tube ready with pump10 loaded. Iopenedthe tube and closed and started recipe and it is running now. Door sealed on its own. From seymour at snf.stanford.edu Fri Mar 5 08:24:16 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Mar 2010 08:24:16 -0800 Subject: Comment tylannitride SNF 2010-03-05 08:24:16: changed oil Message-ID: cleaned level glass From karthikv at snf.stanford.edu Wed Mar 17 19:18:43 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Wed, 17 Mar 2010 19:18:43 -0700 Subject: Problem tylannitride SNF 2010-03-17 19:18:41: failed leak check - passed after pushing door in Message-ID: Failed leak check once while running NEWLSN (jumped from step 35 to 115) . Pressure stayed at 2000, possibly due to door not shutting properly. Repeated the process and pushed the door in while starting recipe again and the process worked fine. From karthikv at snf.stanford.edu Thu Mar 18 00:03:58 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 18 Mar 2010 00:03:58 -0700 Subject: Comment tylannitride SNF 2010-03-18 00:03:58: Variations in thickness Message-ID: loaded 15 wafers in middle boat. 1 dummy in front and 2 in the back. Deposition time was 1hr (NEWLSN). Front wafer thickness was 0.45um and back wafer thickness was 0.56um. Thickness variation was about 50nm From seymour at snf.stanford.edu Thu Mar 18 08:06:31 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 08:06:31 -0700 Subject: Comment tylannitride SNF 2010-01-27 09:01:30: oil changed Message-ID: noted From seymour at snf.stanford.edu Thu Mar 18 08:06:41 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 08:06:41 -0700 Subject: Comment tylannitride SNF 2010-02-05 07:58:26: oil changed Message-ID: noted From seymour at snf.stanford.edu Thu Mar 18 08:06:55 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 08:06:55 -0700 Subject: Comment tylannitride SNF 2010-01-07 09:55:31: lowered loader Message-ID: noted From seymour at snf.stanford.edu Thu Mar 18 08:09:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 08:09:22 -0700 Subject: Comment tylannitride SNF 2010-02-19 08:09:36: oil changed Message-ID: noted From seymour at snf.stanford.edu Thu Mar 18 08:09:32 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 08:09:32 -0700 Subject: Comment tylannitride SNF 2010-03-05 08:24:16: changed oil Message-ID: noted From cursive at snf.stanford.edu Thu Mar 18 12:09:02 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 18 Mar 2010 12:09:02 -0700 Subject: Problem tylannitride SNF 2010-03-18 12:09:01: Control PC doesn't work Message-ID: From seymour at snf.stanford.edu Thu Mar 18 13:29:17 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 13:29:17 -0700 Subject: Problem tylannitride SNF 2010-03-18 12:09:01: Control PC doesn't work Message-ID: Ted reset Tycom From seymour at snf.stanford.edu Thu Mar 18 13:30:10 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 18 Mar 2010 13:30:10 -0700 Subject: Problem tylannitride SNF 2010-03-17 19:18:41: failed leak check - passed after pushing door in Message-ID: system being ran with no more problems being called out From seymour at snf.stanford.edu Fri Mar 19 08:28:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 19 Mar 2010 08:28:51 -0700 Subject: Comment tylannitride SNF 2010-03-19 08:28:50: oil changed Message-ID: level glass cleaned From cursive at snf.stanford.edu Sun Mar 21 11:52:30 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 21 Mar 2010 11:52:30 -0700 Subject: Problem tylannitride SNF 2010-03-21 11:52:29: Load side thermal meter error Message-ID: Set at 778'C, but real temature is at 400'C From tberg at snf.stanford.edu Mon Mar 22 06:41:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Mar 2010 06:41:14 -0700 Subject: Problem tylannitride SNF 2010-03-21 11:52:29: Load side thermal meter error Message-ID: Cleaned contacts on TC connection temp reading correctly From cursive at snf.stanford.edu Fri Mar 26 15:25:31 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 26 Mar 2010 15:25:31 -0700 Subject: Problem tylannitride SNF 2010-03-26 15:25:31: high base pressure Message-ID: At step 35 nitride 2, normal is <10, but it's 35 now. From seymour at snf.stanford.edu Tue Mar 30 10:48:11 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 30 Mar 2010 10:48:11 -0700 Subject: Problem tylannitride SNF 2010-03-26 15:25:31: high base pressure Message-ID: did oil change and cleaned level glass. From latta at snf.stanford.edu Tue Mar 30 14:43:11 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 30 Mar 2010 14:43:11 -0700 Subject: Problem tylannitride SNF 2010-03-30 14:43:10: won't run PUMP10 program Message-ID: Alarms on attempt From latta at snf.stanford.edu Tue Mar 30 14:43:46 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 30 Mar 2010 14:43:46 -0700 Subject: Problem tylannitride SNF 2010-03-30 14:43:46: Base pressure still high- 41.5mT Message-ID: But system passes leak check fine. From seymour at snf.stanford.edu Tue Mar 30 15:26:21 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 30 Mar 2010 15:26:21 -0700 Subject: Shutdown tylannitride SNF 2010-03-30 15:26:21: pumping issues Message-ID: base pressure is high. From seymour at snf.stanford.edu Wed Mar 31 11:33:24 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 11:33:24 -0700 Subject: Problem tylannitride SNF 2010-03-30 14:43:10: won't run PUMP10 program Message-ID: pump replaced From seymour at snf.stanford.edu Wed Mar 31 11:33:40 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 11:33:40 -0700 Subject: Problem tylannitride SNF 2010-03-30 14:43:46: Base pressure still high- 41.5mT Message-ID: pump replaced From seymour at snf.stanford.edu Wed Mar 31 11:34:43 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 11:34:43 -0700 Subject: Shutdown tylannitride SNF 2010-03-30 15:26:21: pumping issues Message-ID: Ted and I replaced the pump. good base at 3 mT. Rate of rise 10 mT/min. needs testing after repair From seymour at snf.stanford.edu Wed Mar 31 11:34:58 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 31 Mar 2010 11:34:58 -0700 Subject: Problem tylannitride SNF 2010-03-31 11:34:58: needs testing after repair Message-ID: