Comment tylannitride SNF 2010-03-18 00:03:58: Variations in thickness

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Thu Mar 18 00:03:58 PDT 2010


loaded 15 wafers in middle boat. 1 dummy in front and 2 in the back. Deposition time was 1hr (NEWLSN). Front wafer thickness was 0.45um and back wafer thickness was 0.56um. Thickness variation was about 50nm 




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