Problem tylannitride SNF 2010-05-02 12:31:14: MFS alarm

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Sun May 2 12:31:15 PDT 2010


Tube keeps giving an MFS alarm. PRCPR doesn't drop below 2000 in step 30. Unable to do depositions.




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