Comment tylannitride SNF 2010-05-06 00:32:45: NEWLSN run data after pump repair

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu May 6 00:32:46 PDT 2010


Middle 4-inch boat
Three groups of 3 wafers (total 9 wafers)
Targeted 5000A
Actual thicknesses:
Boat left: 5290, 5485, 5608, 5524, 5621 (CTRBL)
Boat center: 5880, 6000, 6115, 6177, 6168
Boat right: 6344, 6480, 6630, 6683, 6701
Recipe: NEWLSN 70 minutes
Litho nanospec, used default RI of 2.001




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