Comment tylannitride SNF 2010-05-07 12:28:21: possible boat problem

pcristman at snf.stanford.edu pcristman at snf.stanford.edu
Fri May 7 12:28:22 PDT 2010


Tube did not fully boat in after I unloaded my wafers.  I manually boated in the last bit and ran the pump program without a problem.  Next user should check if it is indeed a problem.




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