Comment tylannitride SNF 2010-10-14 18:40:50: nitride2

yeh at snf.stanford.edu yeh at snf.stanford.edu
Thu Oct 14 18:40:51 PDT 2010


dep rate seems to be lower
previous dep rate: 37.5A/min
latest dep rate: 33A/min
temperature and pressure was within range when gas flow began.
my nitride came out almost 15% lower than expected.




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