From maurice at snf.stanford.edu Wed Apr 6 11:20:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:20:40 -0700 Subject: Problem tylannitride SNF 2011-02-18 19:28:52: MFS alarm Message-ID: Many user have run tube since this report with seeing the problem again. From maurice at snf.stanford.edu Wed Apr 6 11:20:54 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 6 Apr 2011 11:20:54 -0700 Subject: Comment tylannitride SNF 2011-02-14 20:38:50: dummy wafer broken Message-ID: logged From karthikv at snf.stanford.edu Thu Apr 7 01:39:11 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 7 Apr 2011 01:39:11 -0700 Subject: Comment tylannitride SNF 2011-04-07 01:39:10: Tube at atm pressure Message-ID: pump program was loaded but was at step 00. Found tube at atmospheric pressure From karthikv at snf.stanford.edu Thu Apr 7 17:15:40 2011 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Thu, 7 Apr 2011 17:15:40 -0700 Subject: Problem tylannitride SNF 2011-04-07 17:15:40: pump10 program does not run to completion Message-ID: There seems to be a problem with the pump because of which pump10 does not proceed to completion. Programs alarms out and the tube remains at atmospheric pressure. From seymour at snf.stanford.edu Fri Apr 8 10:06:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 Apr 2011 10:06:01 -0700 Subject: Problem tylannitride SNF 2011-04-07 17:15:40: pump10 program does not run to completion Message-ID: tube running pump10 this morning when checked. From lindaw at snf.stanford.edu Sat Apr 9 13:48:32 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 9 Apr 2011 13:48:32 -0700 Subject: Problem tylannitride SNF 2011-04-09 13:48:32: wide slot 4" boat missing Message-ID: What happened to the wide slot quartz boat that used to be in the tylanpoly? Please return it to the tylan poly. Someone put two 3" boats and one thin slot 4" boat sometime after the recent clean. I really need the wide slot boat for my 1mm wafers. From lindaw at snf.stanford.edu Sat Apr 9 13:49:10 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 9 Apr 2011 13:49:10 -0700 Subject: Comment tylannitride SNF 2011-04-09 13:49:10: previous comment ment for tylanpoly. sorry Message-ID: From tberg at snf.stanford.edu Mon Apr 11 06:22:22 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 06:22:22 -0700 Subject: Problem tylannitride SNF 2011-04-09 13:48:32: wide slot 4" boat missing Message-ID: wrong tube From tberg at snf.stanford.edu Mon Apr 11 06:22:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 11 Apr 2011 06:22:34 -0700 Subject: Comment tylannitride SNF 2011-04-09 13:49:10: previous comment ment for tylanpoly. sorry Message-ID: wrong tube From maurice at snf.stanford.edu Mon Apr 11 15:13:57 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 11 Apr 2011 15:13:57 -0700 Subject: Shutdown tylannitride SNF 2011-04-11 15:13:56: DCS unstable Message-ID: From shott at snf.stanford.edu Wed Apr 13 15:42:16 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 13 Apr 2011 15:42:16 -0700 Subject: Shutdown tylannitride SNF 2011-04-11 15:13:56: DCS unstable Message-ID: DCS has been pumped out and restored to service following rebuild of the "upstairs" burn box. Thanks to Mike Dickey, Ted Berg, Ray Seymour, Mary Tang, and Maurice Stevens for important contributions to the project. John From maurice at snf.stanford.edu Wed Apr 13 16:04:15 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Apr 2011 16:04:15 -0700 Subject: Shutdown tylannitride SNF 2011-04-13 16:04:15: needs test Message-ID: From maurice at snf.stanford.edu Wed Apr 13 16:27:49 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Apr 2011 16:27:49 -0700 Subject: Shutdown tylannitride SNF 2011-04-13 16:04:15: needs test Message-ID: change to problem reserved time for a test tomorrow users can use...but we recommend they do a test run first From maurice at snf.stanford.edu Wed Apr 13 16:28:04 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Apr 2011 16:28:04 -0700 Subject: Problem tylannitride SNF 2011-04-13 16:28:04: needs a test Message-ID: change to problem reserved time for a test tomorrow users can use...but we recommend they do a test run first From maurice at snf.stanford.edu Thu Apr 14 13:46:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 14 Apr 2011 13:46:47 -0700 Subject: Problem tylannitride SNF 2011-04-13 16:28:04: needs a test Message-ID: ran NEWLSN 00:15:00 expected ~1200 Actually 1470ang Deposition rate a little higher than expected...recoreded in logbook From seymour at snf.stanford.edu Fri Apr 15 08:15:45 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Apr 2011 08:15:45 -0700 Subject: Comment tylannitride SNF 2011-04-15 08:15:43: oil and filter changed Message-ID: level glass cleaned From sclaussen at snf.stanford.edu Thu Apr 21 02:05:14 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 21 Apr 2011 02:05:14 -0700 Subject: Problem tylannitride SNF 2011-04-21 02:05:13: recipes won't begin- problem with door interlock Message-ID: My recipe (NEWLSN) didn't move beyond Step 10 (Boat in). I waited ~40 minutes with nothing, and tried restarting it once. I then loaded PUMP10, and it is stuck at the same point (Step 5- Boat in). I left it in this state. From tberg at snf.stanford.edu Thu Apr 21 06:45:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 Apr 2011 06:45:34 -0700 Subject: Problem tylannitride SNF 2011-04-21 02:05:13: recipes won't begin- problem with door interlock Message-ID: tightened clutch cable ran pump10 program no problem-door may not have been totally closed