From tberg at snf.stanford.edu Tue Aug 2 07:35:56 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:35:56 -0700 Subject: Comment tylannitride SNF 2011-07-27 11:49:06: found gas ring seals melted Message-ID: Replaced orings, modified recipes. Still looks good From tberg at snf.stanford.edu Tue Aug 2 07:36:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:36:06 -0700 Subject: Problem tylannitride SNF 2011-07-28 13:48:32: low deposition rate Message-ID: Replaced orings, modified recipes. Still looks good From tberg at snf.stanford.edu Tue Aug 2 07:36:23 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:36:23 -0700 Subject: Problem tylannitride SNF 2011-07-29 12:01:12: needs testing Message-ID: Replaced orings, modified recipes. Still looks good From tberg at snf.stanford.edu Tue Aug 2 07:36:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 2 Aug 2011 07:36:53 -0700 Subject: Problem tylannitride SNF 2011-07-25 13:32:09: needs test after repair Message-ID: several users have run after repairs.Replaced orings, modified recipes. Still looks good From sclaussen at snf.stanford.edu Sun Aug 14 15:37:01 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 14 Aug 2011 15:37:01 -0700 Subject: Problem tylannitride SNF 2011-08-14 15:37:00: MFS alarm Message-ID: in NEWLSN recipe, had an MFS alarm. Unfortunately, I'm not sure how far into the deposition it occured. From sclaussen at snf.stanford.edu Sun Aug 14 23:29:26 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 14 Aug 2011 23:29:26 -0700 Subject: Problem tylannitride SNF 2011-08-14 23:29:25: no DCS Message-ID: .. explains the multiple MFS alarms. From tberg at snf.stanford.edu Mon Aug 15 06:42:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 06:42:04 -0700 Subject: Shutdown tylannitride SNF 2011-08-15 06:42:04: pull and clean Message-ID: From tberg at snf.stanford.edu Mon Aug 15 09:52:18 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 15 Aug 2011 09:52:18 -0700 Subject: Problem tylannitride SNF 2011-08-14 23:29:25: no DCS Message-ID: DCS is back on and reset From tberg at snf.stanford.edu Tue Aug 16 14:18:34 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:18:34 -0700 Subject: Comment tylannitride SNF 2011-08-16 14:18:34: Tube is back together and in coat Message-ID: Tube is back together and in coat. Will need atest after coat is finished. to Yellow for testing From tberg at snf.stanford.edu Tue Aug 16 14:18:57 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:18:57 -0700 Subject: Shutdown tylannitride SNF 2011-08-15 06:42:04: pull and clean Message-ID: Tube is back together and in coat. Will need atest after coat is finished. to Yellow for testing From tberg at snf.stanford.edu Tue Aug 16 14:19:26 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:19:26 -0700 Subject: Problem tylannitride SNF 2011-08-16 14:19:25: Needs Test Message-ID: From tberg at snf.stanford.edu Tue Aug 16 14:19:45 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Aug 2011 14:19:45 -0700 Subject: Problem tylannitride SNF 2011-08-14 15:37:00: MFS alarm Message-ID: DCS is back on From sclaussen at snf.stanford.edu Tue Aug 16 15:00:07 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 16 Aug 2011 15:00:07 -0700 Subject: Problem tylannitride SNF 2011-08-16 15:00:06: Tube released before it was ready Message-ID: I was told by maintenance that this tube would be ready at 2:30pm, and started my prediff clean (to test the tube myself, since the staff isn't going to do it) accordingly. I obviously should have verified its status myself, since at 2:45pm, the tube still had more than an hour to go on its coat process, with no understanding from the staff for why I was so upset that I had to reclean my wafers. From sclaussen at snf.stanford.edu Tue Aug 16 16:10:13 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 16 Aug 2011 16:10:13 -0700 Subject: Problem tylannitride SNF 2011-08-16 16:10:12: Front portion of tube is boated out but remainder is not Message-ID: From seymour at snf.stanford.edu Wed Aug 17 08:30:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Aug 2011 08:30:11 -0700 Subject: Problem tylannitride SNF 2011-08-16 16:10:12: Front portion of tube is boated out but remainder is not Message-ID: loader comes all the way out and returnes normally From seymour at snf.stanford.edu Wed Aug 17 08:30:50 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Aug 2011 08:30:50 -0700 Subject: Problem tylannitride SNF 2011-08-16 15:00:06: Tube released before it was ready Message-ID: tube is ready for a test From sclaussen at snf.stanford.edu Wed Aug 17 11:37:34 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 17 Aug 2011 11:37:34 -0700 Subject: Comment tylannitride SNF 2011-08-17 11:37:33: Tube test good Message-ID: Ran NITRIDE2 for 00:15:00, aiming for 50nm. Deposited 50.2nm on front wafer, 52nm on second one. From sclaussen at snf.stanford.edu Thu Aug 18 01:26:11 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 18 Aug 2011 01:26:11 -0700 Subject: Problem tylannitride SNF 2011-08-18 01:26:10: NEWLSN dep rate off by ~25% Message-ID: For 00:13:00, I usually get 1250A. Today we got between 850A (back of the boat) and 1000A (front of the boat). From sclaussen at snf.stanford.edu Thu Aug 18 15:59:01 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 18 Aug 2011 15:59:01 -0700 Subject: Comment tylannitride SNF 2011-08-18 15:59:00: NEWLSN recipe needs further testing Message-ID: Dep rate was off (as previously noted) and etch rate in hot phosphoric is ~50% of what it usually is. Just a warning to other users... From maurice at snf.stanford.edu Fri Aug 19 08:06:42 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 08:06:42 -0700 Subject: Comment tylannitride SNF 2011-08-19 08:06:41: running NEWLSN test Message-ID: From maurice at snf.stanford.edu Fri Aug 19 14:15:35 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 19 Aug 2011 14:15:35 -0700 Subject: Comment tylannitride SNF 2011-08-19 08:06:41: running NEWLSN test Message-ID: Ran NEWLSN 00:15:00 expected ~1400 actual 1209 (thickness has varied from 1200 to 1450 over the last two years) IR 2.014 A few bubbles on one wafer. No bubbles on second wafer. From chienyuc at snf.stanford.edu Fri Aug 19 19:07:43 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Fri, 19 Aug 2011 19:07:43 -0700 Subject: Comment tylannitride SNF 2011-08-19 19:07:42: Fail to stay in PUMP10 program Message-ID: Found idling without PUMP10 running. Have tried to start the pump program but failed. From tberg at snf.stanford.edu Mon Aug 22 06:42:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 22 Aug 2011 06:42:49 -0700 Subject: Shutdown tylannitride SNF 2011-08-22 06:42:48: Wont Pump Message-ID: From maurice at snf.stanford.edu Tue Aug 23 15:17:48 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 23 Aug 2011 15:17:48 -0700 Subject: Shutdown tylannitride SNF 2011-08-22 06:42:48: Wont Pump Message-ID: Pump replaced!! Ran NEWLSN 00:15:00 expected ~1200 ang Actually 1103 new pump...process pressure lower...lower dep rate IR 2.08 No bubbles From maurice at snf.stanford.edu Tue Aug 23 15:20:35 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 23 Aug 2011 15:20:35 -0700 Subject: Problem tylannitride SNF 2011-08-16 14:19:25: Needs Test Message-ID: test complete From tberg at snf.stanford.edu Thu Aug 25 06:46:44 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 06:46:44 -0700 Subject: Comment tylannitride SNF 2011-08-17 11:37:33: Tube test good Message-ID: noted From tberg at snf.stanford.edu Thu Aug 25 06:47:12 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 06:47:12 -0700 Subject: Problem tylannitride SNF 2011-08-18 01:26:10: NEWLSN dep rate off by ~25% Message-ID: pump replaced From tberg at snf.stanford.edu Thu Aug 25 06:47:26 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 06:47:26 -0700 Subject: Comment tylannitride SNF 2011-08-19 19:07:42: Fail to stay in PUMP10 program Message-ID: pump replaced From tberg at snf.stanford.edu Thu Aug 25 08:30:07 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 25 Aug 2011 08:30:07 -0700 Subject: Shutdown tylannitride SNF 2011-08-25 08:30:07: big leak Message-ID: From seymour at snf.stanford.edu Fri Aug 26 07:27:13 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:27:13 -0700 Subject: Shutdown tylannitride SNF 2011-08-25 08:30:07: big leak Message-ID: pulled tube and replaced with a new one. heating up for a coat. From seymour at snf.stanford.edu Fri Aug 26 07:27:53 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:27:53 -0700 Subject: Shutdown tylannitride SNF 2011-08-26 07:27:53: needs a coat and a test after repair Message-ID: From seymour at snf.stanford.edu Fri Aug 26 11:24:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Aug 2011 11:24:11 -0700 Subject: Shutdown tylannitride SNF 2011-08-26 07:27:53: needs a coat and a test after repair Message-ID: tube coat run completed needs test From seymour at snf.stanford.edu Fri Aug 26 11:25:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 26 Aug 2011 11:25:38 -0700 Subject: Problem tylannitride SNF 2011-08-26 11:25:37: needs testing Message-ID: From cfchiang at snf.stanford.edu Sat Aug 27 16:21:54 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sat, 27 Aug 2011 16:21:54 -0700 Subject: Comment tylannitride SNF 2011-08-27 16:21:53: tested NEWLSN Message-ID: ran NEWLSN 90 minutes got ~0.97 microns. Did not see particles.