Comment tylannitride SNF 2011-08-18 15:59:00: NEWLSN recipe needs further testing

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Thu Aug 18 15:59:01 PDT 2011


Dep rate was off (as previously noted) and etch rate in hot phosphoric is ~50% of what it usually is. Just a warning to other users...




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