Shutdown tylannitride SNF 2011-08-22 06:42:48: Wont Pump

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Aug 23 15:17:48 PDT 2011

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Pump replaced!!
Ran NEWLSN  00:15:00
expected ~1200 ang
Actually 1103
new pump...process pressure lower...lower dep rate
IR  2.08
No bubbles

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