From seymour at snf.stanford.edu Fri Feb 4 08:42:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 4 Feb 2011 08:42:18 -0800 Subject: Comment tylannitride SNF 2011-02-04 08:42:18: oil changed Message-ID: filter replaced and view window cleaned From tberg at snf.stanford.edu Mon Feb 14 10:21:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Feb 2011 10:21:20 -0800 Subject: Problem tylannitride SNF 2011-02-14 10:21:20: DCS is low Message-ID: If you have critical DCS runs perhaps you should delay. Cylinder is on order and should be here soon. From wonukjo at snf.stanford.edu Mon Feb 14 20:38:51 2011 From: wonukjo at snf.stanford.edu (wonukjo at snf.stanford.edu) Date: Mon, 14 Feb 2011 20:38:51 -0800 Subject: Comment tylannitride SNF 2011-02-14 20:38:50: dummy wafer broken Message-ID: broke one of the dummy wafers. my appology if someone was planning on using tonight. From tberg at snf.stanford.edu Tue Feb 15 06:12:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Feb 2011 06:12:49 -0800 Subject: Shutdown tylannitride SNF 2011-02-15 06:12:49: Pull and clean Message-ID: From tberg at snf.stanford.edu Wed Feb 16 07:56:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Feb 2011 07:56:31 -0800 Subject: Problem tylannitride SNF 2011-02-14 10:21:20: DCS is low Message-ID: DCS is back on From seymour at snf.stanford.edu Thu Feb 17 10:34:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Feb 2011 10:34:17 -0800 Subject: Comment tylannitride SNF 2011-02-17 10:34:16: heating up for a coat run Message-ID: From seymour at snf.stanford.edu Fri Feb 18 10:04:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Feb 2011 10:04:33 -0800 Subject: Shutdown tylannitride SNF 2011-02-15 06:12:49: Pull and clean Message-ID: pull and clean completed. coat completed. From seymour at snf.stanford.edu Fri Feb 18 10:05:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Feb 2011 10:05:03 -0800 Subject: Problem tylannitride SNF 2011-02-18 10:05:02: needs test after pull and clean Message-ID: From seymour at snf.stanford.edu Fri Feb 18 10:05:21 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 18 Feb 2011 10:05:21 -0800 Subject: Comment tylannitride SNF 2011-02-17 10:34:16: heating up for a coat run Message-ID: coat completed From cachang at snf.stanford.edu Fri Feb 18 19:28:52 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 18 Feb 2011 19:28:52 -0800 Subject: Problem tylannitride SNF 2011-02-18 19:28:52: MFS alarm Message-ID: Running NEWLSN MFS alarm in step #25. Couldn't move forward to next step. From haemmerl at snf.stanford.edu Tue Feb 22 13:53:59 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Tue, 22 Feb 2011 13:53:59 -0800 Subject: Problem tylannitride SNF 2011-02-22 13:53:58: Problem with door seal Message-ID: When I ran the pump program it ended after a few minutes. I reran it and monitored the pressure, the pressure wasn't going down, therefore I manualy closed the door and it finally pumped down. We checked with the next user if it was still acting during his nitride dep, and again we had to hold the step and close the door manually.