Shutdown tylannitride SNF 2011-02-15 06:12:49: Pull and clean
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Feb 15 06:12:49 PST 2011
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Comment tylannitride SNF 2011-02-14 20:38:50: dummy wafer broken
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Shutdown tylannitride SNF 2011-02-15 06:12:49: Pull and clean
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Comment tylannitride SNF 2011-02-14 20:38:50: dummy wafer broken
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Shutdown tylannitride SNF 2011-02-15 06:12:49: Pull and clean
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