Problem tylannitride SNF 2011-02-22 13:53:58: Problem with door seal

haemmerl at snf.stanford.edu haemmerl at snf.stanford.edu
Tue Feb 22 13:53:59 PST 2011


When I ran the pump program it ended after a few minutes. I reran it and monitored the pressure, the pressure wasn't going down, therefore I manualy closed the door and it finally pumped down. 
We checked with the next user if it was still acting during his nitride dep, and again we had to hold the step and close the door manually.




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