From malekos at snf.stanford.edu Fri Jul 8 18:10:27 2011 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Fri, 8 Jul 2011 18:10:27 -0700 Subject: Shutdown tylannitride SNF 2011-07-08 18:10:27: leak test failed multiple times Message-ID: Tried running process multiple times and it would not pass the leak test. From seymour at snf.stanford.edu Mon Jul 11 11:30:12 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jul 2011 11:30:12 -0700 Subject: Shutdown tylannitride SNF 2011-07-08 18:10:27: leak test failed multiple times Message-ID: tube is now pumped down. The base was 0 mT and ROR was 7 mT/min. The problem with pump down was door not sealing when slo pump valve opens. I believe loader motor backlash causes this and a new motor is on order. A slight push on door will seal it enough to pump system down. I will put the tube to yellow and a note to push on door when slo pump valve opens to seal the tube and reach base pressure. From seymour at snf.stanford.edu Mon Jul 11 11:32:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jul 2011 11:32:03 -0700 Subject: Problem tylannitride SNF 2011-07-11 11:32:02: loader needs to be pushed in when slo pump valves opens Message-ID: a new loader motor is on order. Tube will pump down to a good base when door seals. From seymour at snf.stanford.edu Thu Jul 14 09:07:20 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jul 2011 09:07:20 -0700 Subject: Comment tylannitride SNF 2011-07-14 09:07:19: oil changed Message-ID: filter changed, sight glass clean From seymour at snf.stanford.edu Thu Jul 14 14:00:44 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jul 2011 14:00:44 -0700 Subject: Problem tylannitride SNF 2011-07-11 11:32:02: loader needs to be pushed in when slo pump valves opens Message-ID: replaced loader cable and drive pully. door seals when slo pump valve opens From seymour at snf.stanford.edu Thu Jul 14 14:44:36 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 14 Jul 2011 14:44:36 -0700 Subject: Comment tylannitride SNF 2011-07-14 14:44:35: door still needs a slight push to seal Message-ID: when slo pump vavle turns on door has intermitten seal problem. a slight push on loader assembly will seal the door and tube will pump down. From seymour at snf.stanford.edu Fri Jul 15 09:10:01 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Jul 2011 09:10:01 -0700 Subject: Shutdown tylannitride SNF 2011-07-15 09:10:00: working on loader Message-ID: From seymour at snf.stanford.edu Fri Jul 15 13:30:56 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 Jul 2011 13:30:56 -0700 Subject: Shutdown tylannitride SNF 2011-07-15 09:10:00: working on loader Message-ID: door sealing afterloader rebuild From maurice at snf.stanford.edu Mon Jul 18 16:23:01 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Jul 2011 16:23:01 -0700 Subject: Shutdown tylannitride SNF 2011-07-18 16:23:00: load zone reading 400 Message-ID: From seymour at snf.stanford.edu Tue Jul 19 07:09:21 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Jul 2011 07:09:21 -0700 Subject: Shutdown tylannitride SNF 2011-07-18 16:23:00: load zone reading 400 Message-ID: I checked status of tube and all zones were at temp From xzhuan1 at snf.stanford.edu Fri Jul 22 13:04:53 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 22 Jul 2011 13:04:53 -0700 Subject: Shutdown tylannitride SNF 2011-07-22 13:04:52: cannot pump down Message-ID: there is a big leak somewhere. tube cannot pump down. From seymour at snf.stanford.edu Mon Jul 25 11:40:59 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Jul 2011 11:40:59 -0700 Subject: Comment tylannitride SNF 2011-07-25 11:40:58: passed cold leak check Message-ID: I replaced gas ring orings and reassembled tube. Heating tube up for hot leak check, and test. From seymour at snf.stanford.edu Mon Jul 25 13:30:59 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Jul 2011 13:30:59 -0700 Subject: Shutdown tylannitride SNF 2011-07-22 13:04:52: cannot pump down Message-ID: passed cold and hot leak test. From seymour at snf.stanford.edu Mon Jul 25 13:32:10 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Jul 2011 13:32:10 -0700 Subject: Problem tylannitride SNF 2011-07-25 13:32:09: needs test after repair Message-ID: hot leak test good. base 2 mT, ROR was 10 mT/min. From seymour at snf.stanford.edu Mon Jul 25 13:32:26 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Jul 2011 13:32:26 -0700 Subject: Comment tylannitride SNF 2011-07-14 14:44:35: door still needs a slight push to seal Message-ID: door good From seymour at snf.stanford.edu Tue Jul 26 15:23:51 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Jul 2011 15:23:51 -0700 Subject: Problem tylannitride SNF 2011-07-26 15:23:50: DCS flow alarms Message-ID: found no DCS flowing during run. found wire pulled out of molex connector. repaired open connection and dcs flowed. From tberg at snf.stanford.edu Wed Jul 27 06:03:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Jul 2011 06:03:30 -0700 Subject: Comment tylannitride SNF 2011-06-02 14:44:54: pulled tube Message-ID: test completed From tberg at snf.stanford.edu Wed Jul 27 06:03:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Jul 2011 06:03:40 -0700 Subject: Comment tylannitride SNF 2011-06-17 11:22:02: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Wed Jul 27 06:03:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 27 Jul 2011 06:03:53 -0700 Subject: Comment tylannitride SNF 2011-07-25 11:40:58: passed cold leak check Message-ID: noted From seymour at snf.stanford.edu Wed Jul 27 09:09:08 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 09:09:08 -0700 Subject: Shutdown tylannitride SNF 2011-07-27 09:09:08: high base pressure Message-ID: From seymour at snf.stanford.edu Wed Jul 27 11:49:07 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 27 Jul 2011 11:49:07 -0700 Subject: Comment tylannitride SNF 2011-07-27 11:49:06: found gas ring seals melted Message-ID: From seymour at snf.stanford.edu Thu Jul 28 10:53:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Jul 2011 10:53:55 -0700 Subject: Shutdown tylannitride SNF 2011-07-27 09:09:08: high base pressure Message-ID: pulled tube and replaced gas ring orings. cold and hot leak checks good. From seymour at snf.stanford.edu Thu Jul 28 10:55:06 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Jul 2011 10:55:06 -0700 Subject: Problem tylannitride SNF 2011-07-26 15:23:50: DCS flow alarms Message-ID: found faulty contact for DCS flow. repaired contact and checked operation. From xzhuan1 at snf.stanford.edu Thu Jul 28 13:48:32 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 28 Jul 2011 13:48:32 -0700 Subject: Problem tylannitride SNF 2011-07-28 13:48:32: low deposition rate Message-ID: nitride2 recipe for 30 min. expected thickness 1200A, got only 680A. From xzhuan1 at snf.stanford.edu Thu Jul 28 14:26:25 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 28 Jul 2011 14:26:25 -0700 Subject: Problem tylannitride SNF 2011-07-28 14:26:24: cannot pump down in pump10 recipe Message-ID: canot reach step 25. pump down failed. From seymour at snf.stanford.edu Thu Jul 28 15:15:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Jul 2011 15:15:33 -0700 Subject: Shutdown tylannitride SNF 2011-07-28 15:15:33: tube not pumping down to base pressure Message-ID: From seymour at snf.stanford.edu Fri Jul 29 12:00:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Jul 2011 12:00:38 -0700 Subject: Shutdown tylannitride SNF 2011-07-28 15:15:33: tube not pumping down to base pressure Message-ID: tube pumping normally after gas ring orings changed From seymour at snf.stanford.edu Fri Jul 29 12:00:49 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Jul 2011 12:00:49 -0700 Subject: Problem tylannitride SNF 2011-07-28 14:26:24: cannot pump down in pump10 recipe Message-ID: pumps now From seymour at snf.stanford.edu Fri Jul 29 12:01:13 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Jul 2011 12:01:13 -0700 Subject: Problem tylannitride SNF 2011-07-29 12:01:12: needs testing Message-ID: From maurice at snf.stanford.edu Fri Jul 29 12:04:07 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 29 Jul 2011 12:04:07 -0700 Subject: Comment tylannitride SNF 2011-07-29 12:04:06: nitride2 pull speed/temp changed Message-ID: Changes in Nitride2 recipe in step 105 temp reduced from500 to 450 in step 110 pull speed reduced from 25 to 10