Problem tylannitride SNF 2011-07-28 13:48:32: low deposition rate

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Thu Jul 28 13:48:32 PDT 2011


nitride2 recipe for 30 min. expected thickness 1200A, got only 680A.




More information about the tylannitride-pcs mailing list