Problem tylannitride SNF 2011-07-28 14:26:24: cannot pump down in pump10 recipe

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Thu Jul 28 14:26:25 PDT 2011

Previous message: Problem tylannitride SNF 2011-07-28 13:48:32: low deposition rate
Next message: Problem tylannitride SNF 2011-07-28 14:26:24: cannot pump down in pump10 recipe
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

canot reach step 25. pump down failed.

Previous message: Problem tylannitride SNF 2011-07-28 13:48:32: low deposition rate
Next message: Problem tylannitride SNF 2011-07-28 14:26:24: cannot pump down in pump10 recipe
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the tylannitride-pcs mailing list