From paik at snf.stanford.edu Thu May 5 18:35:50 2011 From: paik at snf.stanford.edu (paik at snf.stanford.edu) Date: Thu, 5 May 2011 18:35:50 -0700 Subject: Problem tylannitride SNF 2011-05-05 18:35:49: recipe compilation error Message-ID: an error occured during recipe compilation. the recipe was loaded and the run was fine. but the error message popped. From seymour at snf.stanford.edu Fri May 6 07:35:57 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 May 2011 07:35:57 -0700 Subject: Problem tylannitride SNF 2011-05-05 18:35:49: recipe compilation error Message-ID: stopped pump10 recipe. loaded newlsn, pump10, nitride1, and pump10 with no errors and complete load shown on tycom. From chienyuc at snf.stanford.edu Fri May 6 14:24:28 2011 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Fri, 6 May 2011 14:24:28 -0700 Subject: Comment tylannitride SNF 2011-05-06 14:24:28: TEMPL sensor problem Message-ID: Running NITRIDE2. TEMPL sensor always at 400C in whole process. From seymour at snf.stanford.edu Fri May 6 14:42:32 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 6 May 2011 14:42:32 -0700 Subject: Comment tylannitride SNF 2011-05-06 14:24:28: TEMPL sensor problem Message-ID: found load reading 400. reset the tcu and swapped t/c around. load t/c reads good. There were no "B's". Now temps read correctly and all zones are at setpoint. Front zone was indication 400 but temp was really at 778. From seymour at snf.stanford.edu Tue May 10 09:48:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 May 2011 09:48:52 -0700 Subject: Comment tylannitride SNF 2011-05-10 09:48:52: oil and filter changed Message-ID: level glass clean From ywidjaja at snf.stanford.edu Wed May 18 07:03:41 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Wed, 18 May 2011 07:03:41 -0700 Subject: Problem tylannitride SNF 2011-05-18 07:03:41: TEMPL reading is always 400 Message-ID: Running recipe NEWLSN. From seymour at snf.stanford.edu Wed May 18 07:58:57 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 18 May 2011 07:58:57 -0700 Subject: Problem tylannitride SNF 2011-05-18 07:03:41: TEMPL reading is always 400 Message-ID: removed TCU boardand cleaned TCU board contacts. reset any errors on TCU. checked tycom status page for tube and all zones were reading correctly. Tube now controlling at zone setpoints. From arion at snf.stanford.edu Sun May 22 20:02:24 2011 From: arion at snf.stanford.edu (arion at snf.stanford.edu) Date: Sun, 22 May 2011 20:02:24 -0700 Subject: Problem tylannitride SNF 2011-05-22 20:02:23: could not pump down (newlsn) Message-ID: I tried to load newlsn, furnace refused to reach adequate pressure. I tried the pump10 program as well but it didn't work. I took my wafers out and disabled the furnace. From tberg at snf.stanford.edu Mon May 23 07:07:30 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 May 2011 07:07:30 -0700 Subject: Problem tylannitride SNF 2011-05-22 20:02:23: could not pump down (newlsn) Message-ID: pump overload had tripped. Reset ran pump program no problem From srikantv at snf.stanford.edu Mon May 23 22:28:52 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 23 May 2011 22:28:52 -0700 Subject: Problem tylannitride SNF 2011-05-23 22:28:51: TEMPL sensor not working Message-ID: From tberg at snf.stanford.edu Tue May 24 06:15:05 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 May 2011 06:15:05 -0700 Subject: Problem tylannitride SNF 2011-05-23 22:28:51: TEMPL sensor not working Message-ID: Cleaned contacts on profile tc working fine now