Problem tylannitride SNF 2011-05-22 20:02:23: could not pump down (newlsn)

arion at snf.stanford.edu arion at snf.stanford.edu
Sun May 22 20:02:24 PDT 2011


I tried to load newlsn, furnace refused to reach adequate pressure. I tried the pump10 program as well but it didn't work. I took my wafers out and disabled the furnace.




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