From seymour at snf.stanford.edu Thu Nov 10 08:54:11 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 10 Nov 2011 08:54:11 -0800 Subject: Comment tylannitride SNF 2011-11-10 08:54:10: oil and filter changed Message-ID: level glass cleaned From axiu at snf.stanford.edu Fri Nov 11 18:18:21 2011 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Fri, 11 Nov 2011 18:18:21 -0800 Subject: Comment tylannitride SNF 2011-11-11 18:18:20: Keyboard Message-ID: Keyboard does not working now. From cfchiang at snf.stanford.edu Mon Nov 14 18:08:43 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Mon, 14 Nov 2011 18:08:43 -0800 Subject: Problem tylannitride SNF 2011-11-14 18:08:42: Temperature control issue Message-ID: Wanted to run NEWLSN, the temperature wasn't able to get to the target 850C and remained at 816C. Aborted the process just before real deposition started and ran pump10 program per instructed. It looked like the temperature is not ramp down as well. Now still reads 816C. From tberg at snf.stanford.edu Tue Nov 15 09:06:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:06:50 -0800 Subject: Comment tylannitride SNF 2011-11-15 09:06:49: Found elementb CB off Message-ID: Found elementb CB off-Reset From tberg at snf.stanford.edu Tue Nov 15 09:07:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:07:20 -0800 Subject: Comment tylannitride SNF 2011-11-11 18:18:20: Keyboard Message-ID: working now From tberg at snf.stanford.edu Tue Nov 15 09:07:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:07:49 -0800 Subject: Comment tylannitride SNF 2011-09-30 09:59:16: oil changed Message-ID: noted From tberg at snf.stanford.edu Tue Nov 15 09:08:04 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:08:04 -0800 Subject: Comment tylannitride SNF 2011-10-21 09:04:12: oil and filter changed Message-ID: noted From hector at snf.stanford.edu Tue Nov 15 19:55:36 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Tue, 15 Nov 2011 19:55:36 -0800 Subject: Problem tylannitride SNF 2011-11-15 19:55:36: TCU error Message-ID: at step 25 temp <<< 850C, it was 800C aborted run let cool down From hector at snf.stanford.edu Wed Nov 16 00:37:54 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Wed, 16 Nov 2011 00:37:54 -0800 Subject: Shutdown tylannitride SNF 2011-11-16 00:37:54: Message-ID: Since a couple of us users had the same TCU error (temp < 850C) at step 25 on program NEWLSN, I am shutting the furnace down. I would have run PUMP10, but it appears the keybord doesn't work now either... From tberg at snf.stanford.edu Wed Nov 16 07:49:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 Nov 2011 07:49:50 -0800 Subject: Shutdown tylannitride SNF 2011-11-16 00:37:54: Message-ID: Reset circuit breaker reset TCU. ADJUSTED OVERTEMP.Will leave in yellow for observation. From maurice at snf.stanford.edu Wed Nov 16 11:27:27 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Nov 2011 11:27:27 -0800 Subject: Comment tylannitride SNF 2011-11-16 11:27:26: running Newlsn Message-ID: Running up to temp to check for TCU error From maurice at snf.stanford.edu Wed Nov 16 11:57:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Nov 2011 11:57:17 -0800 Subject: Shutdown tylannitride SNF 2011-11-16 11:57:17: TCU error Message-ID: Running newLSN TCU error 4 in step 25 setpoint tempc=854 actual tempc=805 From tberg at snf.stanford.edu Thu Nov 17 05:57:49 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 Nov 2011 05:57:49 -0800 Subject: Comment tylannitride SNF 2011-11-17 05:57:49: SCR cooling Fan is Dead Message-ID: Another should be here today From seymour at snf.stanford.edu Thu Nov 17 15:18:48 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Nov 2011 15:18:48 -0800 Subject: Shutdown tylannitride SNF 2011-11-16 11:57:17: TCU error Message-ID: SCR cooling fan replaced. ran tube in manual with a setpoint of 850.0 L zone 851.0 C zone 849.9 S zone 851.3 From seymour at snf.stanford.edu Thu Nov 17 15:19:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Nov 2011 15:19:38 -0800 Subject: Problem tylannitride SNF 2011-11-15 19:55:36: TCU error Message-ID: SCR fan faulity has beeen replaced From seymour at snf.stanford.edu Thu Nov 17 15:19:55 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Nov 2011 15:19:55 -0800 Subject: Problem tylannitride SNF 2011-11-14 18:08:42: Temperature control issue Message-ID: SCR fan replaced From seymour at snf.stanford.edu Thu Nov 17 15:20:43 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Nov 2011 15:20:43 -0800 Subject: Comment tylannitride SNF 2011-11-17 15:20:42: SCR fan replaced heated in manual to 850 Message-ID: