Problem tylannitride SNF 2011-11-14 18:08:42: Temperature control issue

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Mon Nov 14 18:08:43 PST 2011


Wanted to run NEWLSN, the temperature wasn't able to get to the target 850C and remained at 816C. Aborted the process just before real deposition started and ran pump10 program per instructed. It looked like the temperature is not ramp down as well. Now still reads 816C.




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