From grahamab at snf.stanford.edu Mon Oct 3 15:17:00 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 3 Oct 2011 15:17:00 -0700 Subject: Comment tylannitride SNF 2011-10-03 15:17:00: increased process pressure Message-ID: Running NEWLSN for 2hrs 45min. Process pressure was ~260mT at beginning but rose to ~280 after 2 hours. Process pressure using this recipe seems to have increased from previous months. From arion at snf.stanford.edu Mon Oct 10 10:21:43 2011 From: arion at snf.stanford.edu (arion at snf.stanford.edu) Date: Mon, 10 Oct 2011 10:21:43 -0700 Subject: Problem tylannitride SNF 2011-10-10 10:21:42: Venting Message-ID: Chamber never reached atmosphere after aborting pump10. I waited 30min From maurice at snf.stanford.edu Mon Oct 10 10:41:14 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Oct 2011 10:41:14 -0700 Subject: Shutdown tylannitride SNF 2011-10-10 10:41:14: working of soft pump Message-ID: From tberg at snf.stanford.edu Mon Oct 10 11:07:53 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2011 11:07:53 -0700 Subject: Shutdown tylannitride SNF 2011-10-10 10:41:14: working of soft pump Message-ID: Cleaned soft pump valve it vents now From tberg at snf.stanford.edu Mon Oct 10 11:08:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 10 Oct 2011 11:08:08 -0700 Subject: Problem tylannitride SNF 2011-10-10 10:21:42: Venting Message-ID: Cleaned soft pump valve it vents now From cfchiang at snf.stanford.edu Mon Oct 10 23:24:50 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Mon, 10 Oct 2011 23:24:50 -0700 Subject: Problem tylannitride SNF 2011-10-10 23:24:50: deposition pressure kept increasing Message-ID: Ran recipe NEWLSN. The tube was able to maintain the pressure around 256mtorr when we deposited last month. Now the pressure kept increasing during deposition and by the end of my deposition (total 165min dep), the pressure was 316mtorr. This is almost 25% increment!! From cfchiang at snf.stanford.edu Mon Oct 10 23:54:24 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Mon, 10 Oct 2011 23:54:24 -0700 Subject: Problem tylannitride SNF 2011-10-10 23:54:23: plenty of bubbles from NEWLSN.... Message-ID: wafers come out with PLENTY of bubbles ... to the extent that the bubble to wafer area is significant From maurice at snf.stanford.edu Tue Oct 11 10:56:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 10:56:55 -0700 Subject: Shutdown tylannitride SNF 2011-10-11 10:56:54: running test Message-ID: Running test after burnbox cleaned From maurice at snf.stanford.edu Tue Oct 11 16:05:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:05:36 -0700 Subject: Shutdown tylannitride SNF 2011-10-11 10:56:54: running test Message-ID: ran NEWLSN 00:15:00 expected ~1200 ang Actually 1276 ir= 2.2 (normal) process pressure 259mtorr bubbles in film From maurice at snf.stanford.edu Tue Oct 11 16:07:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:07:32 -0700 Subject: Problem tylannitride SNF 2011-10-11 16:07:31: bubbles in film Message-ID: ran NEWLSN 00:15:00 expected ~1200 ang Actually 1276 ir= 2.2 (normal) process pressure 259mtorr bubbles in film From tberg at snf.stanford.edu Thu Oct 13 07:03:37 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 13 Oct 2011 07:03:37 -0700 Subject: Comment tylannitride SNF 2011-10-13 07:03:37: Checked exhaust line from pump to burnbox Message-ID: Checked exhaust line from pump to burnbox. Everything is clear no blockage. From maurice at snf.stanford.edu Thu Oct 13 11:02:30 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Oct 2011 11:02:30 -0700 Subject: Shutdown tylannitride SNF 2011-10-13 11:02:29: running NEWLSN test Message-ID: From latta at snf.stanford.edu Thu Oct 13 15:29:49 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Oct 2011 15:29:49 -0700 Subject: Shutdown tylannitride SNF 2011-10-13 11:02:29: running NEWLSN test Message-ID: ran- and looks good... From maurice at snf.stanford.edu Thu Oct 13 16:11:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Oct 2011 16:11:02 -0700 Subject: Comment tylannitride SNF 2011-10-13 16:11:02: newlsn test/bubbles in film Message-ID: Ran NEWLSN 00:15:00 expected 1200ang actual 1177 bubbles in film From maurice at snf.stanford.edu Fri Oct 14 11:16:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:16:02 -0700 Subject: Comment tylannitride SNF 2011-10-14 11:16:01: nitride2 test/bubbles in film Message-ID: Ran nitride2 00:30:00 expected 1100 ang actual 1157 ir=2.02 (expected 2.0...good) bubbles in film From seymour at snf.stanford.edu Fri Oct 14 11:43:29 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 14 Oct 2011 11:43:29 -0700 Subject: Comment tylannitride SNF 2011-10-14 11:43:29: pull and clean Message-ID: down for pull and clean starting on Monday morning From sclaussen at snf.stanford.edu Fri Oct 14 17:53:57 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 14 Oct 2011 17:53:57 -0700 Subject: Comment tylannitride SNF 2011-10-14 17:53:56: NITRIDE2 pressure during process Message-ID: The pressure started around 208 and climbed to 223 during a 40 minute process. I monitored it throughout and it seemed fairly stable. From tberg at snf.stanford.edu Mon Oct 17 06:10:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 17 Oct 2011 06:10:33 -0700 Subject: Shutdown tylannitride SNF 2011-10-17 06:10:32: pull and clean Message-ID: From tberg at snf.stanford.edu Tue Oct 18 06:56:45 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2011 06:56:45 -0700 Subject: Comment tylannitride SNF 2011-10-18 06:56:44: started coat Message-ID: Nitride2 for 45 min From tberg at snf.stanford.edu Tue Oct 18 09:00:01 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2011 09:00:01 -0700 Subject: Comment tylannitride SNF 2011-10-18 09:00:00: Needs test-coat completed Message-ID: From tberg at snf.stanford.edu Tue Oct 18 09:00:33 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Oct 2011 09:00:33 -0700 Subject: Comment tylannitride SNF 2011-10-18 06:56:44: started coat Message-ID: coat completed needs test From seymour at snf.stanford.edu Tue Oct 18 09:27:20 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 18 Oct 2011 09:27:20 -0700 Subject: Problem tylannitride SNF 2011-10-18 09:27:19: needs testing after pull and clean Message-ID: tube coat complete From maurice at snf.stanford.edu Tue Oct 18 10:42:13 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 10:42:13 -0700 Subject: Problem tylannitride SNF 2011-10-18 10:42:12: testing after tube pull Message-ID: From maurice at snf.stanford.edu Tue Oct 18 16:25:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:25:02 -0700 Subject: Shutdown tylannitride SNF 2011-10-17 06:10:32: pull and clean Message-ID: ran Nitride2 00:30:00 expected 1100ang Actual 1084 - bubbles in flim From maurice at snf.stanford.edu Tue Oct 18 16:25:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:25:36 -0700 Subject: Problem tylannitride SNF 2011-10-18 10:42:12: testing after tube pull Message-ID: ran Nitride2 00:30:00 expected 1100ang Actual 1084 - bubbles in flim From maurice at snf.stanford.edu Tue Oct 18 16:25:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:25:47 -0700 Subject: Problem tylannitride SNF 2011-10-18 09:27:19: needs testing after pull and clean Message-ID: test complete From maurice at snf.stanford.edu Tue Oct 18 16:25:59 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:25:59 -0700 Subject: Comment tylannitride SNF 2011-10-18 09:00:00: Needs test-coat completed Message-ID: complete From maurice at snf.stanford.edu Tue Oct 18 16:26:23 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:26:23 -0700 Subject: Comment tylannitride SNF 2011-10-14 11:43:29: pull and clean Message-ID: logged From maurice at snf.stanford.edu Tue Oct 18 16:27:02 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:27:02 -0700 Subject: Problem tylannitride SNF 2011-10-11 16:07:31: bubbles in film Message-ID: see newer comment in coral From maurice at snf.stanford.edu Tue Oct 18 16:27:18 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:27:18 -0700 Subject: Problem tylannitride SNF 2011-10-10 23:54:23: plenty of bubbles from NEWLSN.... Message-ID: see newer comment From maurice at snf.stanford.edu Tue Oct 18 16:27:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:27:34 -0700 Subject: Comment tylannitride SNF 2011-09-15 23:33:44: tested NEWLSN Message-ID: logged From maurice at snf.stanford.edu Tue Oct 18 16:27:45 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:27:45 -0700 Subject: Comment tylannitride SNF 2011-09-26 21:53:47: mostly particle free Message-ID: logged From maurice at snf.stanford.edu Tue Oct 18 16:28:01 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:28:01 -0700 Subject: Comment tylannitride SNF 2011-09-09 13:17:21: running test Message-ID: logged From maurice at snf.stanford.edu Tue Oct 18 16:28:12 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:28:12 -0700 Subject: Comment tylannitride SNF 2011-08-27 16:21:53: tested NEWLSN Message-ID: logged From maurice at snf.stanford.edu Tue Oct 18 16:28:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Oct 2011 16:28:34 -0700 Subject: Comment tylannitride SNF 2011-07-29 12:04:06: nitride2 pull speed/temp changed Message-ID: logged From maurice at snf.stanford.edu Wed Oct 19 14:41:53 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2011 14:41:53 -0700 Subject: Shutdown tylannitride SNF 2011-10-19 14:41:52: testing for bubbles Message-ID: From maurice at snf.stanford.edu Wed Oct 19 18:22:20 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2011 18:22:20 -0700 Subject: Shutdown tylannitride SNF 2011-10-19 14:41:52: testing for bubbles Message-ID: RAN NITRID2 00:30:00 expected 1100 ang actual 1069 No bubbles in film From maurice at snf.stanford.edu Wed Oct 19 18:22:43 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2011 18:22:43 -0700 Subject: Comment tylannitride SNF 2011-10-14 11:16:01: nitride2 test/bubbles in film Message-ID: RAN NITRID2 00:30:00 expected 1100 ang actual 1069 No bubbles in film From maurice at snf.stanford.edu Wed Oct 19 18:22:55 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2011 18:22:55 -0700 Subject: Comment tylannitride SNF 2011-10-13 07:03:37: Checked exhaust line from pump to burnbox Message-ID: LOGGED From maurice at snf.stanford.edu Wed Oct 19 18:23:18 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Oct 2011 18:23:18 -0700 Subject: Comment tylannitride SNF 2011-10-14 17:53:56: NITRIDE2 pressure during process Message-ID: LOGGED From seymour at snf.stanford.edu Fri Oct 21 09:04:13 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 21 Oct 2011 09:04:13 -0700 Subject: Comment tylannitride SNF 2011-10-21 09:04:12: oil and filter changed Message-ID: From tberg at snf.stanford.edu Tue Oct 25 06:27:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 06:27:40 -0700 Subject: Shutdown tylannitride SNF 2011-10-25 06:27:40: water work Message-ID: From tberg at snf.stanford.edu Tue Oct 25 11:15:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 25 Oct 2011 11:15:50 -0700 Subject: Shutdown tylannitride SNF 2011-10-25 06:27:40: water work Message-ID: water work done