From seymour at snf.stanford.edu Fri Sep 2 07:34:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 2 Sep 2011 07:34:17 -0700 Subject: Problem tylannitride SNF 2011-08-26 11:25:37: needs testing Message-ID: test done From grahamab at snf.stanford.edu Sun Sep 4 20:04:14 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sun, 4 Sep 2011 20:04:14 -0700 Subject: Problem tylannitride SNF 2011-09-04 20:04:13: tube did not pump down on first attempt Message-ID: running NEWLSN. tube did not pump down on first try. after boating out, I re-ran the recipe and it worked the second time. From hector at snf.stanford.edu Mon Sep 5 23:34:27 2011 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Mon, 5 Sep 2011 23:34:27 -0700 Subject: Shutdown tylannitride SNF 2011-09-05 23:34:27: tube won't pump down Message-ID: tube has been at atmosphere for quite a while now... From seymour at snf.stanford.edu Fri Sep 9 10:20:39 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:20:39 -0700 Subject: Problem tylannitride SNF 2011-09-04 20:04:13: tube did not pump down on first attempt Message-ID: gas ring orings failed. From seymour at snf.stanford.edu Fri Sep 9 10:21:47 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:21:47 -0700 Subject: Shutdown tylannitride SNF 2011-09-05 23:34:27: tube won't pump down Message-ID: removed and rebuilt gate valve and tube gas ring. passes leak check. needs testing. From seymour at snf.stanford.edu Fri Sep 9 10:22:23 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Sep 2011 10:22:23 -0700 Subject: Problem tylannitride SNF 2011-09-09 10:22:22: needs testing after repair. Message-ID: From maurice at snf.stanford.edu Fri Sep 9 13:17:22 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Sep 2011 13:17:22 -0700 Subject: Comment tylannitride SNF 2011-09-09 13:17:21: running test Message-ID: From maurice at snf.stanford.edu Fri Sep 9 13:18:06 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Sep 2011 13:18:06 -0700 Subject: Shutdown tylannitride SNF 2011-09-09 13:18:05: running test after pumpdown issues (EOM) Message-ID: From maurice at snf.stanford.edu Fri Sep 9 15:49:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Sep 2011 15:49:17 -0700 Subject: Shutdown tylannitride SNF 2011-09-09 13:18:05: running test after pumpdown issues (EOM) Message-ID: ran NEWLSN 00:15:00 expecteted`1200 ang Actually 1245ang no bubbles From maurice at snf.stanford.edu Fri Sep 9 15:49:38 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 9 Sep 2011 15:49:38 -0700 Subject: Problem tylannitride SNF 2011-09-09 10:22:22: needs testing after repair. Message-ID: test complete From chen0622 at snf.stanford.edu Mon Sep 12 13:40:57 2011 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Mon, 12 Sep 2011 13:40:57 -0700 Subject: Problem tylannitride SNF 2011-09-12 13:40:57: TEMP L Message-ID: Temp L temperature set point 790C but value is only 400 C. not sure the reading is correct. From tberg at snf.stanford.edu Tue Sep 13 06:18:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:18:06 -0700 Subject: Problem tylannitride SNF 2011-09-12 13:40:57: TEMP L Message-ID: Cleaned TC connections. Temps reading fine now From seymour at snf.stanford.edu Tue Sep 13 14:15:06 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Sep 2011 14:15:06 -0700 Subject: Shutdown tylannitride SNF 2011-09-13 14:15:05: high base pressure Message-ID: From seymour at snf.stanford.edu Thu Sep 15 07:19:17 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Sep 2011 07:19:17 -0700 Subject: Shutdown tylannitride SNF 2011-09-13 14:15:05: high base pressure Message-ID: removed tube and replaced gas ring orings. passed cold and hot leak check. needs testing after repair. From seymour at snf.stanford.edu Thu Sep 15 07:19:33 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Sep 2011 07:19:33 -0700 Subject: Problem tylannitride SNF 2011-09-15 07:19:32: needs test after repair Message-ID: From cfchiang at snf.stanford.edu Thu Sep 15 23:33:44 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Thu, 15 Sep 2011 23:33:44 -0700 Subject: Comment tylannitride SNF 2011-09-15 23:33:44: tested NEWLSN Message-ID: Ran NEWLSN an hour. Don't see bubbles on the films. 1st wafer got 5982A on average with standard deviation 123A. 2nd wafer got 5913A on average with standard deviation 75A. wafers were loaded every other slot. From seymour at snf.stanford.edu Fri Sep 16 11:33:38 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Sep 2011 11:33:38 -0700 Subject: Problem tylannitride SNF 2011-09-15 07:19:32: needs test after repair Message-ID: user tested tool with good results From cfchiang at snf.stanford.edu Fri Sep 16 19:22:12 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 16 Sep 2011 19:22:12 -0700 Subject: Problem tylannitride SNF 2011-09-16 19:22:12: bubbles on LSN films Message-ID: Followed by the test run yesterday, my deposition today went terribly. During deposition MFS alarm went off all the time and the film came out covered with many bubbles .... From seymour at snf.stanford.edu Mon Sep 19 08:33:05 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 19 Sep 2011 08:33:05 -0700 Subject: Problem tylannitride SNF 2011-09-16 19:22:12: bubbles on LSN films Message-ID: During the removal of the AG4100 and the AG4108 the ammonia was turned off and the line capped. The ammonia was left turned off on the purge panel. I flowed the ammonia in tylannitride and it flowed to setpoint. From cfchiang at snf.stanford.edu Wed Sep 21 20:40:19 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Wed, 21 Sep 2011 20:40:19 -0700 Subject: Problem tylannitride SNF 2011-09-21 20:40:19: still can't get particle free LSN film Message-ID: Since the last "silicon" deposition and after NH3 turned back on, I ran NEWLSN three times. Tool is still unable to give particle-free nitride film. It's likely time to clean the tube. From maurice at snf.stanford.edu Mon Sep 26 14:36:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 26 Sep 2011 14:36:29 -0700 Subject: Problem tylannitride SNF 2011-09-21 20:40:19: still can't get particle free LSN film Message-ID: DCS tank replaced and NH3 line vacuum/bakefilled seveal times - Ran NEWLSN 00:15:00 expected ~1250ang Actually 1257 refractive index 2.22 rudolph no bubbles From grahamab at snf.stanford.edu Mon Sep 26 21:53:47 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 26 Sep 2011 21:53:47 -0700 Subject: Comment tylannitride SNF 2011-09-26 21:53:47: mostly particle free Message-ID: running NEWLSN, wafers near the front of the boat had some particles, but not as severe as before. deposition thickness (2.5hrs) varied from 1.45um at front of boat to 1.2um at rear of boat using every other slot. From seymour at snf.stanford.edu Fri Sep 30 09:59:16 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Sep 2011 09:59:16 -0700 Subject: Comment tylannitride SNF 2011-09-30 09:59:16: oil changed Message-ID: