Comment tylannitride SNF 2011-09-15 23:33:44: tested NEWLSN

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Thu Sep 15 23:33:44 PDT 2011


Ran NEWLSN an hour. Don't see bubbles on the films.
1st wafer got 5982A on average with standard deviation 123A.
2nd wafer got 5913A on average with standard deviation 75A.
wafers were loaded every other slot.




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