Problem tylannitride SNF 2011-09-16 19:22:12: bubbles on LSN films

seymour at snf.stanford.edu seymour at snf.stanford.edu
Mon Sep 19 08:33:05 PDT 2011


During the removal of the AG4100 and the AG4108 the ammonia was turned off and the line capped. The ammonia was left turned off on the purge panel. 
I flowed the ammonia in tylannitride and it flowed to setpoint.




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