Problem tylannitride SNF 2011-09-21 20:40:19: still can't get particle free LSN film

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Wed Sep 21 20:40:19 PDT 2011


Since the last "silicon" deposition and after NH3 turned back on, I ran NEWLSN three times. Tool is still unable to give particle-free nitride film. It's likely time to clean the tube.




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