Comment tylannitride SNF 2011-09-26 21:53:47: mostly particle free

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Sep 26 21:53:47 PDT 2011


running NEWLSN, wafers near the front of the boat had some particles, but not as severe as before.  deposition thickness (2.5hrs) varied from 1.45um at front of boat to 1.2um at rear of boat using every other slot.  




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