From npapte at snf.stanford.edu  Mon Apr  2 19:53:22 2012
From: npapte at snf.stanford.edu (npapte at snf.stanford.edu)
Date: Mon, 2 Apr 2012 19:53:22 -0700
Subject: Problem tylannitride SNF 2012-04-02 19:53:21: nitride backup disc missing
Message-ID: <mailman.1882.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

NItride backup disc is missing. The NITRIDE2 recipe on the original nitride disc is corrupted, and won't load



From latta at snf.stanford.edu  Wed Apr  4 15:04:26 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 4 Apr 2012 15:04:26 -0700
Subject: Problem tylannitride SNF 2011-10-10 23:24:50: deposition pressure kept increasing
Message-ID: <mailman.1883.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Wed Apr  4 15:05:24 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 4 Apr 2012 15:05:24 -0700
Subject: Problem tylannitride SNF 2012-04-02 19:53:21: nitride backup disc missing
Message-ID: <mailman.1884.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

added a back up disk to the container near the tycom.  I loaded NITRIDE2 with no problems.



From latta at snf.stanford.edu  Wed Apr  4 15:05:55 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 4 Apr 2012 15:05:55 -0700
Subject: Comment tylannitride SNF 2012-03-15 23:48:23: Nitride 2 file corrupted ??
Message-ID: <mailman.1885.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

back up disk in container.



From jpadovani at snf.stanford.edu  Fri Apr  6 19:51:46 2012
From: jpadovani at snf.stanford.edu (jpadovani at snf.stanford.edu)
Date: Fri, 6 Apr 2012 19:51:46 -0700
Subject: Problem tylannitride SNF 2012-04-06 19:51:45: failed leak check
Message-ID: <mailman.1886.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

Failed leak check (step 40) 3 times in a row during NITRIDE2.



From seymour at snf.stanford.edu  Mon Apr  9 09:10:53 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 9 Apr 2012 09:10:53 -0700
Subject: Problem tylannitride SNF 2012-04-06 19:51:45: failed leak check
Message-ID: <mailman.1887.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

Tedd found pump off. I cleaned door seal and leak check passed.



From seymour at snf.stanford.edu  Mon Apr  9 09:11:51 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 9 Apr 2012 09:11:51 -0700
Subject: Comment tylannitride SNF 2012-04-09 09:11:50: did oil change on pump
Message-ID: <mailman.1888.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

cleaned sight glass. base and ror good.



From mtang at snf.stanford.edu  Tue Apr 10 20:13:51 2012
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Tue, 10 Apr 2012 20:13:51 -0700
Subject: Shutdown tylannitride SNF 2012-04-10 20:13:51: Burnbox warning
Message-ID: <mailman.1889.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

The burnbox has no water.  Exhaust cannot be effectively treated.



From tberg at snf.stanford.edu  Wed Apr 11 07:57:33 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 11 Apr 2012 07:57:33 -0700
Subject: Shutdown tylannitride SNF 2012-04-10 20:13:51: Burnbox warning
Message-ID: <mailman.1890.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

AGC repaired exhaust to burn box it is fine now



From tberg at snf.stanford.edu  Fri Apr 20 06:18:09 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 20 Apr 2012 06:18:09 -0700
Subject: Shutdown tylannitride SNF 2012-04-20 06:18:08: burnbox
Message-ID: <mailman.1891.1357938962.26006.tylannitride-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Apr 20 07:18:59 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 20 Apr 2012 07:18:59 -0700
Subject: Shutdown tylannitride SNF 2012-04-20 06:18:08: burnbox
Message-ID: <mailman.1892.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

fixed water leak back on line



From mtang at snf.stanford.edu  Mon Apr 23 21:11:45 2012
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Mon, 23 Apr 2012 21:11:45 -0700
Subject: Shutdown tylannitride SNF 2012-04-23 21:11:45: Burnbox alarm
Message-ID: <mailman.1893.1357938962.26006.tylannitride-pcs@snf.stanford.edu>

Tylan LPCVD Burnbox went into alarm.  No processing allowed.