From seymour at snf.stanford.edu Mon Feb 6 09:19:37 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Feb 2012 09:19:37 -0800 Subject: Shutdown tylannitride SNF 2012-02-06 09:19:37: pump makes grindin g sound when turned on Message-ID: From seymour at snf.stanford.edu Tue Feb 7 13:30:36 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 7 Feb 2012 13:30:36 -0800 Subject: Shutdown tylannitride SNF 2012-02-06 09:19:37: pump makes grindin g sound when turned on Message-ID: the pump is good. tube door seal leaking. Put blank door on after cleaning stuck door seal off tube end and tube based to 11 mT. I will rebuild loader door. From seymour at snf.stanford.edu Thu Feb 16 08:59:53 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Feb 2012 08:59:53 -0800 Subject: Shutdown tylannitride SNF 2011-12-09 13:57:21: Ammonia c ylinsder removed and placed on STS Message-ID: ammonia cylinder connected to purge panel before shutdown for renivation. From seymour at snf.stanford.edu Thu Feb 16 09:02:24 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Feb 2012 09:02:24 -0800 Subject: Comment tylannitride SNF 2012-02-16 09:02:23: replaced tube Message-ID: rebuilt gate valve, and replaced door seal. tube passes cold and hot leak check. will need coat and test after dichlorosilane turned back on. From seymour at snf.stanford.edu Thu Feb 16 09:05:09 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 16 Feb 2012 09:05:09 -0800 Subject: Shutdown tylannitride SNF 2012-02-16 09:05:09: dichlorosilane turned off Message-ID: waiting for new epi chamber instalation gas panel to be completed. From seymour at snf.stanford.edu Wed Feb 29 08:50:42 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 29 Feb 2012 08:50:42 -0800 Subject: Comment tylannitride SNF 2012-02-29 08:50:41: oil filter changed Message-ID: