From seymour at snf.stanford.edu Tue Jul 3 11:16:54 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Jul 2012 11:16:54 -0700 Subject: Comment tylannitride SNF 2012-07-03 11:16:54: oil changed Message-ID: filter changed sight glass cleaned From tberg at snf.stanford.edu Mon Jul 9 06:24:40 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 06:24:40 -0700 Subject: Problem tylannitride SNF 2012-06-21 13:06:39: MFS alarm (NH3) Message-ID: noted not repeated From pnataraj at snf.stanford.edu Mon Jul 16 14:20:04 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Mon, 16 Jul 2012 14:20:04 -0700 Subject: Shutdown tylannitride SNF 2012-07-16 14:20:04: cables snaped during lodaing Message-ID: un loaded wafers, just needs cable to be replaced. process ran fine From seymour at snf.stanford.edu Mon Jul 16 14:48:12 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Jul 2012 14:48:12 -0700 Subject: Shutdown tylannitride SNF 2012-07-16 14:20:04: cables snaped during lodaing Message-ID: replaced broken loader drive cable. closed door and started pump10 From seymour at snf.stanford.edu Tue Jul 17 08:33:39 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 17 Jul 2012 08:33:39 -0700 Subject: Comment tylannitride SNF 2012-07-17 08:33:39: air to slo pump valve leaking Message-ID: cut back tubing nand installed new fitting From maurice at snf.stanford.edu Tue Jul 24 14:47:49 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Jul 2012 14:47:49 -0700 Subject: Shutdown tylannitride SNF 2012-07-24 14:47:48: Silane alarm Message-ID: