From dwnam at snf.stanford.edu Fri Jun 8 14:31:21 2012 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Fri, 8 Jun 2012 14:31:21 -0700 Subject: Problem tylannitride SNF 2012-06-08 14:31:21: Too low deposition rate? Message-ID: Just ran nitride2 recipe and expected 500nm deposition. But, got only 80nm. This looks like the same problem that happened to Tylan BPSG last night (raneeyoo reported the problem.) It may have stopped during the deposition. From grahamab at snf.stanford.edu Fri Jun 8 16:10:57 2012 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 8 Jun 2012 16:10:57 -0700 Subject: Problem tylannitride SNF 2012-06-08 16:10:56: increasing process pressure Message-ID: running NEWLSN. All leak check numbers looked good. Process pressure started around 250mT and steadily increased to ~270mT after approximately 15min of processing. aborted the process and ran pump program as process pressure is actually important. From seymour at snf.stanford.edu Mon Jun 11 09:50:36 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jun 2012 09:50:36 -0700 Subject: Comment tylannitride SNF 2012-06-11 09:50:35: oil and filter change Message-ID: sight glass cleaned From seymour at snf.stanford.edu Mon Jun 11 15:33:01 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 11 Jun 2012 15:33:01 -0700 Subject: Comment tylannitride SNF 2012-06-11 15:33:00: ran coat 10 for 15 mins Message-ID: process pressure started at 216 mT and it was 216 mT after the 15 mins of deposition. From tberg at snf.stanford.edu Wed Jun 13 07:14:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:14:10 -0700 Subject: Problem tylannitride SNF 2012-06-08 16:10:56: increasing process pressure Message-ID: Oil and filter changed pressure is stable several users since no issues reported From tberg at snf.stanford.edu Wed Jun 13 07:14:18 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:14:18 -0700 Subject: Problem tylannitride SNF 2012-06-08 14:31:21: Too low deposition rate? Message-ID: Oil and filter changed pressure is stable several users since no issues reported From tberg at snf.stanford.edu Wed Jun 13 07:14:30 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:14:30 -0700 Subject: Comment tylannitride SNF 2011-11-10 08:54:10: oil and filter changed Message-ID: noted From tberg at snf.stanford.edu Wed Jun 13 07:14:40 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:14:40 -0700 Subject: Comment tylannitride SNF 2012-02-16 09:02:23: replaced tube Message-ID: noted From tberg at snf.stanford.edu Wed Jun 13 07:14:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:14:54 -0700 Subject: Comment tylannitride SNF 2012-02-29 08:50:41: oil filter changed Message-ID: noted From tberg at snf.stanford.edu Wed Jun 13 07:15:03 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:15:03 -0700 Subject: Comment tylannitride SNF 2012-04-09 09:11:50: did oil change on pump Message-ID: noted From tberg at snf.stanford.edu Wed Jun 13 07:15:16 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 13 Jun 2012 07:15:16 -0700 Subject: Comment tylannitride SNF 2012-05-15 14:06:30: changed pump oil Message-ID: noted From hsyoon at snf.stanford.edu Thu Jun 21 13:06:39 2012 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Thu, 21 Jun 2012 13:06:39 -0700 Subject: Problem tylannitride SNF 2012-06-21 13:06:39: MFS alarm (NH3) Message-ID: read .0 ~.3, little fluctuating no problem with deposition