Problem tylannitride SNF 2012-06-08 14:31:21: Too low deposition rate?

dwnam at snf.stanford.edu dwnam at snf.stanford.edu
Fri Jun 8 14:31:21 PDT 2012


Just ran nitride2 recipe and expected 500nm deposition. But, got only 80nm. This looks like the same problem that happened to Tylan BPSG last night (raneeyoo reported the problem.) It may have stopped during the deposition. 




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