Comment tylannitride SNF 2012-03-06 12:01:33: dichlorosilane turned on

seymour at snf.stanford.edu seymour at snf.stanford.edu
Tue Mar 6 12:01:33 PST 2012

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flowed ammonia and dichlor manually. loaded nitride2 recipe and starterd for a 45 min dep to coat tube.

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