Shutdown tylannitride SNF 2012-02-16 09:05:09: dichlorosilane turned off
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Wed Mar 7 13:27:38 PST 2012
DCS on.
Run newlsn 00:15:00
expected ~1200ang
actual 1133ang index 2.2
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