From maurice at snf.stanford.edu Mon May 7 10:58:04 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 7 May 2012 10:58:04 -0700 Subject: Shutdown tylannitride SNF 2012-05-07 10:58:04: gate valve off/on Message-ID: Gate valve shuts off briefly (less than a second) every minute or so No process gas flow Loose connection in interlock? From seymour at snf.stanford.edu Tue May 8 10:13:26 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 May 2012 10:13:26 -0700 Subject: Comment tylannitride SNF 2012-05-08 10:13:26: found tube not running pump10 Message-ID: I loaded and started pump recipe. From maurice at snf.stanford.edu Tue May 8 16:27:02 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 May 2012 16:27:02 -0700 Subject: Comment tylannitride SNF 2012-05-08 16:27:01: created new nitride recipe disk Message-ID: From seymour at snf.stanford.edu Tue May 15 14:06:30 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 15 May 2012 14:06:30 -0700 Subject: Comment tylannitride SNF 2012-05-15 14:06:30: changed pump oil Message-ID: cleaned level glass. base and ror good From tberg at snf.stanford.edu Thu May 17 06:18:53 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 06:18:53 -0700 Subject: Problem tylannitride SNF 2012-05-17 06:18:53: No DCS Message-ID: Cylinder will need to be changed From tberg at snf.stanford.edu Thu May 17 07:08:38 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 07:08:38 -0700 Subject: Comment tylannitride SNF 2012-05-17 07:08:38: DCS Cylinder changed in leak check Message-ID: DCS Cylinder changed in leak check From tberg at snf.stanford.edu Fri May 18 06:20:20 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:20:20 -0700 Subject: Problem tylannitride SNF 2012-05-17 06:18:53: No DCS Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 06:20:28 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:20:28 -0700 Subject: Comment tylannitride SNF 2012-05-17 07:08:38: DCS Cylinder changed in leak check Message-ID: DCS changed leak check OK back on now From maurice at snf.stanford.edu Thu May 31 08:00:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:00:08 -0700 Subject: Shutdown tylannitride SNF 2012-05-07 10:58:04: gate valve off/on Message-ID: Ray found loose connection From maurice at snf.stanford.edu Thu May 31 08:16:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:16:50 -0700 Subject: Shutdown tylannitride SNF 2012-04-23 21:11:45: Burnbox alarm Message-ID: Burnbox interlock installed. Coral interlock installed. - Recipes now have an abort hold step: IF GNTLK=ON GOTO 115 (OR THE CORRECT STEP FOR THAT SPECIFIC PROGRAM) on a new disk. - If burnbox fails or if coral is disabled during a step with process gases, the recipe will abort, turn off process gases, N2 purge and then hold for user. User must press Alarm Ack to vent tube. - PUMP10 NEWLSN LONH378 NITRIDE2 - If other recipes are needed then contact Maurice or Ted. From maurice at snf.stanford.edu Thu May 31 08:17:07 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:17:07 -0700 Subject: Comment tylannitride SNF 2012-05-08 16:27:01: created new nitride recipe disk Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:17:15 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:17:15 -0700 Subject: Comment tylannitride SNF 2012-05-08 10:13:26: found tube not running pump10 Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:17:24 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:17:24 -0700 Subject: Comment tylannitride SNF 2012-03-06 12:01:33: dichlorosilane turned on Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:18:52 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:18:52 -0700 Subject: Comment tylannitride SNF 2012-03-06 14:33:07: faulty TCU board. Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:19:00 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:19:00 -0700 Subject: Comment tylannitride SNF 2011-11-16 11:27:26: running Newlsn Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:19:18 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:19:18 -0700 Subject: Comment tylannitride SNF 2011-08-18 15:59:00: NEWLSN recipe needs further testing Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:19:31 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:19:31 -0700 Subject: Comment tylannitride SNF 2011-10-03 15:17:00: increased process pressure Message-ID: logged From maurice at snf.stanford.edu Thu May 31 08:19:58 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 31 May 2012 08:19:58 -0700 Subject: Comment tylannitride SNF 2011-10-13 16:11:02: newlsn test/bubbles in film Message-ID: logged