Shutdown tylannitride SNF 2012-04-23 21:11:45: Burnbox alarm

[maurice at snf.stanford.edu]

Burnbox interlock installed.
Coral interlock installed.
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Recipes now have an abort hold step: IF GNTLK=ON GOTO 115 (OR THE CORRECT STEP FOR THAT SPECIFIC PROGRAM) on a new disk.
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If burnbox fails or if coral is disabled during a step with process gases, the recipe will abort, turn off process gases, N2 purge and then hold for user.  User must press Alarm Ack to vent tube.
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PUMP10
NEWLSN
LONH378
NITRIDE2
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If other recipes are needed then contact Maurice or Ted.