Shutdown tylannitride SNF 2012-04-23 21:11:45: Burnbox alarm

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu May 31 08:16:50 PDT 2012


Burnbox interlock installed.
Coral interlock installed.
-
Recipes now have an abort hold step: IF GNTLK=ON GOTO 115 (OR THE CORRECT STEP FOR THAT SPECIFIC PROGRAM) on a new disk.
- 
If burnbox fails or if coral is disabled during a step with process gases, the recipe will abort, turn off process gases, N2 purge and then hold for user.  User must press Alarm Ack to vent tube.
-
PUMP10
NEWLSN
LONH378
NITRIDE2
-
If other recipes are needed then contact Maurice or Ted.




More information about the tylannitride-pcs mailing list