From reyrey at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: reyrey at snf.stanford.edu (reyrey at snf.stanford.edu) Date: Apr 13, 2000 Subject: Problem tylannitride: tylannitride t/c b Message-ID: Temp in the load zone has a small b. it is intermittent. From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem Clear tylannitride: same as other problem listed Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 2, 2000 Subject: Problem Clear tylannitride: TC looks fine Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 11, 2000 Subject: Problem tylannitride: Squeaking sound near boat puller mechanism... Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 19, 2000 Subject: Shutdown tylannitride: pressure in burn box Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 19, 2000 Subject: Shutdown Clear tylannitride: completed Message-ID: From sylviajs at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: sylviajs at snf.stanford.edu (sylviajs at snf.stanford.edu) Date: May 19, 2000 Subject: Problem tylannitride: TEMPLb on nitride Message-ID: little "b" on the TEMPL reading From ericp at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: May 21, 2000 Subject: Problem tylannitride: DCS Flow dropped to zero during dep. Message-ID: MFC alarmed, DCS flow dropped to about 20 (setpt 189). From sanli at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: May 23, 2000 Subject: Problem tylannitride: TEMPL giving b, dep. rate is high Message-ID: TEMPL was giving a b signal yesterday. The dep. rate I measured is 3250 Angstrom/hour for LONH378 which is too high. It should be around 2600-2700 A/hour normally. Can it be related with TEMPL? From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear tylannitride: Already reported Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear tylannitride: Alarm in vault caused zero flow Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: May 23, 2000 Subject: Problem Clear tylannitride: Boat loader motor was on Message-ID: From sylviajs at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: sylviajs at snf.stanford.edu (sylviajs at snf.stanford.edu) Date: Jun 28, 2000 Subject: Problem tylannitride: mfs alarm went off Message-ID: last night, found mfs alarm on when wafers came out of tube; not sure if this alarm was on during deposition. (measuring thickness, all seemed as expected though very uneven deposition) From sminne at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: sminne at snf.stanford.edu (sminne at snf.stanford.edu) Date: Jul 6, 2000 Subject: Problem tylannitride: LONH378 films looked non-uniform and splotchy Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 6, 2000 Subject: Problem tylannitride: MFS alarm during PUMP10. Message-ID: From lindaw at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jul 10, 2000 Subject: Problem tylannitride: "b" on TEMPL TC Message-ID: and MFS alarm on nitrogen flow at step 100 (cool down) of process NITRIDE1. From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear tylannitride: Cleaned out fore line Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear tylannitride: Cleaned out fore line Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jul 11, 2000 Subject: Problem Clear tylannitride: redundant problem Message-ID: From wheeler at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: wheeler at snf.stanford.edu (wheeler at snf.stanford.edu) Date: Jul 25, 2000 Subject: Shutdown tylannitride: System requires rebuild Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 10, 2000 Subject: Shutdown Clear tylannitride: System back up Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 10, 2000 Subject: Problem Clear tylannitride: System has been cleaned Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 10, 2000 Subject: Shutdown tylannitride: Nitride down for Characterization test Message-ID: The nitride system has been put back together and the tube has been coated. The system remains down until the results of a characterization test are complete. From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 10, 2000 Subject: Problem Clear tylannitride: Replaced spike T/C Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 11, 2000 Subject: Shutdown Clear tylannitride: Test results O.K. Message-ID: From jgarate at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Sep 11, 2000 Subject: Comment tylannitride: Canceling my reservation for nitride from 06:00 to 16:00 Message-ID: From pzwahlen at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Problem tylannitride: Boat won't come out by itselfDate: Nov 16, 2000 5:31:13 PM Message-ID: From seymour at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Shutdown tylannitride: system shutdownDate: Nov 17, 2000 3:42:04 PM Message-ID: vac valve not sealing, tube wont vent to atmosphere. Tube positioning tabe broken off tube will need to be removed and replaced. From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-08-09 11:23:29: Ran a test Message-ID: <288739.88.1344536609620.JavaMail.coral@shine> Ray replaced the flex line from the exhaust of the pump to the oil trap and also tightened the n2 purge in fitting. We then ran a controlled run with all sensors monitoring but not alarming. We saw no indication on any of the sensors. We also had handheld monitors in the source cabinet and around the area with no indications. Waiting for further instructions From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-09-13 08:19:00: running another monitored test Message-ID: <30240994.135.1347549541065.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-09-13 09:36:30: ran test no problem Message-ID: <21461895.136.1347554191407.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-09-18 09:04:49: ran another lsn test for 25 minutes Message-ID: <16565866.14.1347984290246.JavaMail.coral@shine> ran another lsn test for 25 minutes- no problems, sniffing with clpx and sensors From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-09-21 07:14:11: testing stochiometric Message-ID: <7224926.2.1348236852230.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-09-21 10:04:39: ran stochimetric test Message-ID: <2612772.7.1348247079699.JavaMail.coral@shine> ran stochimetric test no problem From seymour at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-10-09 09:29:08: changed oil and filter Message-ID: <30208834.18.1349800148576.JavaMail.coral@shine> sight glass clean From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Shutdown tylannitride SNF 2012-07-24 14:47:48: Silane alarm Message-ID: <30245996.7.1355494977465.JavaMail.coral@shine> have run several tests no problem. putting it to yellow for NH3 anneal From tberg at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Problem tylannitride SNF 2012-12-14 06:23:33: putting it to yellow for NH3 anneal Message-ID: <14865150.8.1355495013687.JavaMail.coral@shine> putting it to yellow for NH3 anneal. not for Nitride From jackson at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Shutdown tylannitride SNF 2012-12-14 23:48:40: shut down after NH3 anneal Message-ID: <11445896.51.1355557720538.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:15:46 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:15:46 -0000 Subject: Comment tylannitride SNF 2012-12-19 09:52:06: oil and filter changed Message-ID: <29118089.25.1355939527649.JavaMail.coral@shine> level glass cleaned