Problem tylannitride: TEMPL giving b, dep. rate is high

sanli at snf.stanford.edu sanli at snf.stanford.edu
Fri Jan 11 13:15:46 PST 2013

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TEMPL was giving a b signal yesterday. The dep. rate I
measured is 3250 Angstrom/hour for LONH378 which is
too high. It should be around 2600-2700 A/hour normally.
Can it be related with TEMPL?

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