Shutdown tylannitride SNF 2012-07-24 14:47:48: Silane alarm

tberg at snf.stanford.edu tberg at snf.stanford.edu
Fri Jan 11 13:15:46 PST 2013

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have run several tests no problem. putting it to yellow for NH3 anneal

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Next message: Problem tylannitride SNF 2012-12-14 06:23:33: putting it to yellow for NH3 anneal
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