From gaul at snf.stanford.edu Fri Aug 4 08:41:01 2000 From: gaul at snf.stanford.edu (Keith Gaul) Date: Fri, 04 Aug 2000 08:41:01 -0700 Subject: Nitride Status Message-ID: <398AE40D.7754033F@snf.stanford.edu> The nitride tube is going back together but is taking longer than expected. We are doing some modifications to the system to ensure we don't have that type of failure again in the future. I am hoping to have it back together and ready for testing on Tuesday. Thanks for your patience. Keith From jgarate at snf.stanford.edu Tue Aug 15 12:42:51 2000 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Tue, 15 Aug 2000 12:42:51 -0700 Subject: Nitride Furnace Characterisation Message-ID: <39999D3B.D2DD1C01@snf.stanford.edu> Hi users, Here is the data that was collected for nitride: ----------------------------------------------- Recipe: LONH378 Time: 00:46:00 Base Prz: 13.6 Leak Check 13.6 Process Prz 447.3 Thickness: ========= Wafer Schematic ############ ## ## ## ## ## 2 # # # # 1 3 5 # (FLAT) ## # ## 4 # ## ## ## ## ########### Waf# Avg. Loc 1 Loc 2 Loc 3 Loc 4 Loc 5 --- ---- ----- ----- ----- ----- ----- 1 1740 1737 1753 1728 1732 1752 2 1757 1752 1767 1746 1757 1761 3 1748 1747 1756 1735 1753 1751 4 1648 1721 1715 1676 1693 1617 5 1771 1764 1779 1764 1775 1772 Stress: ======= Waf# Stress (Mpa) Curvature (m) ---- ------------ --------------- 1 83.697 497.90 2 82.449 500.55 3 69.449 605.78 4 59.797 705.45 5 72.465 602.50 Thanks, Jaime Garate From jgarate at snf.stanford.edu Tue Aug 15 12:58:57 2000 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Tue, 15 Aug 2000 12:58:57 -0700 Subject: Nitride Furnace Characterisation Message-ID: <3999A101.8E8A61E1@snf.stanford.edu> Hi users, Here are the results from the data that was collected: ------------------------------------------------------ Recipe: LONH378 Time: 00:46:00 1.) Wafer non-uniformity is less than 1% 2.) Stress: 60 to 70 mpa tensile Thanks, Jaime Garate From jgarate at snf.stanford.edu Thu Aug 17 06:48:38 2000 From: jgarate at snf.stanford.edu (Jaime Garate) Date: Thu, 17 Aug 2000 06:48:38 -0700 Subject: Characterisation Message-ID: <399BED36.7307B05A@snf.stanford.edu> Hi users, I would like to thank Eehern Wong for performing the Characterisation test on the nitride tube. Not only for his good timing and excellent performance on the test, but also on his excellent detail data results that he send to me. Thank you Eehern Wong Thanks, Jaime Garate From amol at stanford.edu Thu Aug 17 08:37:58 2000 From: amol at stanford.edu (Amol Ramesh Joshi) Date: Thu, 17 Aug 2000 08:37:58 -0700 (PDT) Subject: reservation cancelled Message-ID: Hi, I have cancelled my tylannitride reservation for today. Sorry for late notice. - Amol From sanli at piezo.Stanford.EDU Thu Aug 24 12:02:38 2000 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Thu, 24 Aug 2000 12:02:38 -0700 (PDT) Subject: reservation removal Message-ID: Hi, I removed my friday morning reservation, because I'll not be able to get my wafers ready. Sorry, if it is a late notice. ________________________________________________________ Arif Sanli Ergun Engineering Research Associate E. L. Ginzton Laboratory, Room : 130, Stanford University, Stanford, CA, 94305-4085 Phone: (650) 723-8447 Fax : (650) 725-7509 www : http://piezo.stanford.edu/group/IRP/sanliIRP.html From bgreene at stanford.edu Fri Aug 25 12:41:58 2000 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Fri, 25 Aug 2000 12:41:58 -0700 (PDT) Subject: Reservation removed Message-ID: Tylannitride users, My wafers will not be ready for my nitride deposition today. I have removed my reservation. Sorry for the late notice, Brian From caudillomalik at netscape.net Mon Aug 28 09:12:06 2000 From: caudillomalik at netscape.net (david caudillo) Date: 28 Aug 00 09:12:06 PDT Subject: 8/28 10:00-14:00 Cancelled Message-ID: <20000828161206.29263.qmail@www0d.netaddress.usa.net> Cancelled reservations for today 8/28 tylannitride #10 from 10am to 2pm. David Caudillo ____________________________________________________________________ Get your own FREE, personal Netscape WebMail account today at http://home.netscape.com/webmail From abowers at siliconlight.com Wed Aug 30 09:36:15 2000 From: abowers at siliconlight.com (Amy Bowers) Date: Wed, 30 Aug 2000 09:36:15 -0700 Subject: tylannitride reservations cancelled Message-ID: tylannitride users, I won't be using my reservations today, beginning at 1:00, so it's available all day. -Amy